Reference 

Command Reference

  1. Documentation
  2. Prealigners
  3. Command Reference

Command Groups #

Dev service commands#

_ADJDN _ADJUP _APPD _FL _HO _PP _PPOS _PPOSD _PPOSU _RL _RV _SERIAL _SPOS _TONC _TONP _VFD _VOD _VOD EL IL ILW KD KDW KI KIW KP KPW NOP POW

Diagnostic commands#

HISTORY

File operation commands#

READP READR SAVEP SAVER

General commands#

BRNIN CYCLE

Global parameter commands#

ARM SNR VER

I o commands#

CVF CVN CVT PDN PIN PUP PVF PVN PVT

Motion commands#

HOM MHP MTC MTP MVA MVR RADJ SOF SON STOP

Motion parameter commands#

ACC DEC HSA RCP RSA UPR VEL

Scanning commands#

_SA ALN AUXERR SCAN SDATA

Status commands#

INP OUT STA

All Commands #

_ADJDN#

PREALIGNER AVAILABILITY
HFP-312

SUMMARY
Report or set Adjust down Offset

SYNTAX
_ADJDN [Value]

Parameters Necessary Param Description
Value No When not provided report current Adjust down Offset. When an value is provided set this value for Adjust down Offset.
Returned Values Return Error
0 No Error.

USAGE NOTES

See also: _ADJUP 

EXAMPLE

>_adjdn
1000
>_adjdn 1001
>

_ADJUP#

PREALIGNER AVAILABILITY
HFP-312

SUMMARY
Report or set Adjust up Offset

SYNTAX
_ADJUP [Value]

Parameters Necessary Param Description
Value No When not provided report current Adjust up Offset. When an value is provided set this value for Adjust up Offset.
Returned Values Return Error
0 No Error.

USAGE NOTES

EXAMPLE

>_adjup
1000
>_adjup 1001
>

_APPD#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Restore factory default parameters

SYNTAX
_APPD

Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS

EXAMPLE

>_APPD
>

_FL#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set axis forward limit

SYNTAX
_FL [Axis] [Value]

Parameters Necessary Param Description
Axis No Axis to report or set.
Value No Value to set to.
Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS
READP

EXAMPLE

>_FL
>

_HO#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set axis home offset

SYNTAX
_HO [Axis] [Value]

Parameters Necessary Param Description
Axis No Axis to report or set.
Value No Value to set to.
Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS
NONE

EXAMPLE

>_HO
>

_PP#

PREALIGNER AVAILABILITY
HFP-312

SUMMARY
Report,set park position or calculate park position based on forward and reverse limit

SYNTAX
_PP [Axes] [Position]

Parameters Necessary Param Description
Axes No When not provided report all axis park position.
Position No When an Axis parameter is provided without a Position, calculate park position based on forward and reverse limit.
Returned Values Return Error
0 No Error.
18 NoLimits

DEVICE PRECONDITIONS
INITIALIZED, HOMED

USAGE NOTES
When used without parameters reports the current park position for all axes. When an Axis parameter is provided with a Position, set this value for park position. When an Axis parameter is provided without a Position, calculate park position based on forward and reverse limit.

EXAMPLE

>_pp
0, 7479, 0
>_pp Z 7480
>_pp
0, 7479, 7480
>_pp Z
>_pp
0, 7479, 4230
>

_PPOS#

PREALIGNER AVAILABILITY
HFP-312

SUMMARY
Report pin position

SYNTAX
_PPOS

Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES

EXAMPLE

>_ppos
4885,5188
>arm 2
>_ppos
Up:4885
Down:5188
>

_PPOSD#

PREALIGNER AVAILABILITY
HFP-312

SUMMARY
Report or set DOWN pins position

SYNTAX
_PPOSD [Value]

Parameters Necessary Param Description
Value No Value to set to.
Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES

See also: _PPOS _PPOSU 

EXAMPLE

>_pposd
5188
>_pposd 5189
>_pposd
5189
>

_PPOSU#

PREALIGNER AVAILABILITY
HFP-312

SUMMARY
Report or set UP pins position

SYNTAX
_PPOSU [Value]

Parameters Necessary Param Description
Value No Value to set to.
Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES

See also: _PPOS _PPOSD 

EXAMPLE

>_pposu
4885
>_pposu 4886
>

_RL#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set axis reverse limit

SYNTAX
_RL [Axis] [Value]

Parameters Necessary Param Description
Axis No Axis to report or set.
Value No Value to set to.
Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS
READP

EXAMPLE

>_RL
>

_RV#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY

SYNTAX
_RV [X1] [X2]

Parameters Necessary Param Description
X1 No Description for X1.
X2 No Description for X2.
Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS
NONE

EXAMPLE

>_RV
>

_SA#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set wafer orientation

SYNTAX
_SA [Angle]

Parameters Necessary Param Description
Angle No Angle on which wafer to be oriented.
Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS
NONE

EXAMPLE

>_sa
9000
>_sa 18000
>

_SERIAL#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Set prealigner serial number

SYNTAX
_SERIAL

Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS
NONE

EXAMPLE

>_SERIAL
>

_SPOS#

PREALIGNER AVAILABILITY
HFP-312

SUMMARY
Report or set scan position

SYNTAX
_SPOS [Value]

Parameters Necessary Param Description
Value No When not provided report current scan position. When an value is provided set this value for scan position.
Returned Values Return Error
0 No Error.

USAGE NOTES

EXAMPLE

>_spos
13500
>_spos 13000
>

_TONC#

PREALIGNER AVAILABILITY
HFP-312

SUMMARY
Report or set Transfer On Chuck Offset

SYNTAX
_TONC [Value]

Parameters Necessary Param Description
Value No When not provided report current Transfer On Chuck Offset. When an value is provided set this value for Transfer On Chuck Offset.
Returned Values Return Error
0 No Error.

USAGE NOTES

EXAMPLE

>_tonc
3000
>_tonc 3001
>

_TONP#

PREALIGNER AVAILABILITY
HFP-312

SUMMARY
Report or set Transfer On Pins Offset

SYNTAX
_TONP [Value]

Parameters Necessary Param Description
Value No When not provided report current Transfer On Pins Offset. When an value is provided set this value for Transfer On Pins Offset.
Returned Values Return Error
0 No Error.

USAGE NOTES

EXAMPLE

>_tonp
3000
>_tonp 3001
>

_VFD#

PREALIGNER AVAILABILITY
HFP-312

SUMMARY
Report,set vacuum off delay in ms

SYNTAX
_VFD [Value]

Parameters Necessary Param Description
Value No When not provided report current vacuum off delay. When an value is provided set this value.
Returned Values Return Error
0 No Error.

USAGE NOTES

EXAMPLE

>_vfd
10

>_vfd 15
>

_VOD#

PREALIGNER AVAILABILITY
HFP-312

SUMMARY
Pins vaccum Enabled / Diasbled

SYNTAX
_VOD [Value]

Parameters Necessary Param Description
Value No When not provided report current state 1- Enabled, 0- Disabled. When an value is provided set this value.
Returned Values Return Error
0 No Error.

USAGE NOTES

EXAMPLE

>_pve
1
>_pve 0
>

_VOD#

PREALIGNER AVAILABILITY
HFP-312

SUMMARY
Report,set vaccum on delay in ms

SYNTAX
_VOD [Value]

Parameters Necessary Param Description
Value No When not provided report current vaccum on delay. When an value is provided set this value.
Returned Values Return Error
0 No Error.

USAGE NOTES

EXAMPLE

>_vod
15
>_vod 10
>

_VT#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set axis error limit

SYNTAX
_VT [X1] [X2]

Parameters Necessary Param Description
X1 No Description for X1.
X2 No Description for X2.
Returned Values Return Error
0 No Error.
12 In Service Mode.

DEVICE PRECONDITIONS
NONE

EXAMPLE

>_VT
>

ACC#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Reports the current acceleration of each axis.

SYNTAX
ACC [Axis] [Value]

Parameters Necessary Param Description
Axis No Specific Axis to report or set.
Value No Value to set the Axis acceleration to.
Returned Values Return Error
0 No Error.
12 In Service Mode.

DEVICE PRECONDITIONS
NONE

USAGE NOTES
When used without parameters reports the current acceleration for all axes. When an Axis parameter is provided without a Value, reports the acceleration for that specific Axis. When Axis and Value parameters are provided, sets the acceleration parameter to the Value for the specific Axis.

EXAMPLE

>ACC
&&&&,&&&&
>ACC T &&&&

>ACC
&&&&,&&&&
>

ALN#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Perform center sequence and orient wafer to specific angle.

SYNTAX
ALN [Angle]

Parameters Necessary Param Description
Angle No Relative offset T-Axis coordinate from sensor to orient wafer notch.
Returned Values Return Error
0 No Error.
3 Interlock.
4 One or more axes servo loop is not enabled.
7 Bad Parameter.
8 No motor power.

DEVICE PRECONDITIONS
SERVO ENABLED

See also: SCAN, _SA 

EXAMPLE

>ALN
>

ARM#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY

SYNTAX
ARM [Mode]

Parameters Necessary Param Description
Mode No Mode to set to.
Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS
NONE

USAGE NOTES

Reports or sets the asynchronous response mode. Determines how the device responds when an asynchronous macro finishes executing. Also effects STATUS .

Mode Description
0 Do Nothing
1 Report the current operating status in hexidecimal format (STATUS).
2 Report the current operating status in words (STATUS).

See also: STATUS 

EXAMPLE

>ARM 1

>STATUS
0093

>ARM 2

>STATUS
Not Homed
Move Done
Software Limit
Servo Off

>

AUXERR#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report last SCAN/ ALN status

SYNTAX
AUXERR

Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS
NONE

USAGE NOTES

Flags Description
0x1 Scan Failed
0x2 Insufficient Data Samples
0x4 Notch Detect Failed
0x8 No Chuck Vacuum
0x10 Move To Chuck Failed
0x20 Move To Pins Failed
0x40 Move To Scan Failed
0x80 Out Of Sensor Range

See also: ALN SCAN 

EXAMPLE

>auxerr
0x0080 : Out Of Sensor Range
>arm 1
>auxerr
0080
>

BRNIN#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY

SYNTAX
BRNIN [X1] [X2]

Parameters Necessary Param Description
X1 No Description for X1.
X2 No Description for X2.
Returned Values Return Error
0 No Error.
12 In Service Mode.

DEVICE PRECONDITIONS
NONE

EXAMPLE

>BRNIN
>

CVF#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Chuck vaccum OFF

SYNTAX
CVF

Returned Values Return Error
0 No Error.
12 In Service Mode.

DEVICE PRECONDITIONS
INITIALIZED

EXAMPLE

>CVF
>

CVN#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Chuck vaccum ON

SYNTAX
CVN

Returned Values Return Error
0 No Error.
12 In Service Mode.

DEVICE PRECONDITIONS
INITIALIZED

EXAMPLE

>CVN
>

CVT#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Toggle chuck vaccum output.

SYNTAX
CVT

Returned Values Return Error
0 No Error.
12 In Service Mode.

DEVICE PRECONDITIONS
INITIALIZED

EXAMPLE

>CVT
>

CYCLE#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY

SYNTAX
CYCLE [X1] [X2]

Parameters Necessary Param Description
X1 No Description for X1.
X2 No Description for X2.
Returned Values Return Error
0 No Error.
12 In Service Mode.

DEVICE PRECONDITIONS
NONE

EXAMPLE

>CYCLE
>

DEC#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set deceleration

SYNTAX
DEC [Axis] [Value]

Parameters Necessary Param Description
Axis No Axis to report or set.
Value No Value to set to.
Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS
INITIALIZED

EXAMPLE

>DEC
72000, 100000, 100000
>

EL#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set axis error limit

SYNTAX
EL [Axis] [Value]

Parameters Necessary Param Description
Axis No Axis to report or set.
Value No Value to set to.
Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS
INITIALIZED

EXAMPLE

>EL
1000, 1000, 1000
>

HISTORY#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
TBD

SYNTAX
HISTORY [X1] [X2]

Parameters Necessary Param Description
X1 No Description for X1.
X2 No Description for X2.
Returned Values Return Error
0 No Error.
12 In Service Mode.

DEVICE PRECONDITIONS
NONE

EXAMPLE

>HISTORY
>

HOM#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Execute Home Procedure

SYNTAX
HOM

Returned Values Return Error
0 No Error.
1
2 Device already running a System or User macro.
3 Interlock.
4 One or more axes servo loop is not enabled.
8 No motor power.

DEVICE PRECONDITIONS
INITIALIZED, SERVO

USAGE NOTES
Executes homing procedure, homing all axes.

See also: SON 

EXAMPLE

>HOME
>0002
>

HSA#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Homing Speed and Acceleration

SYNTAX
HSA

Returned Values Return Error
0 No Error.
1
5 .

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Applies Homing Speed and Acceleration to all axes.

See also: RSA VEL ACC DEC 

EXAMPLE

>HSA
>

IL#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set IL

SYNTAX
IL [Axis] [Value]

Parameters Necessary Param Description
Axis No Axis to report or set.
Value No Value to set to. (0 - 32 767)
Returned Values Return Error
0 No Error.
1
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
IL parameter for Servo PID loop. Must be between 0 and 32 767.

See also: KP KD KI 

EXAMPLE

>IL
2500, 1500
>

ILW#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set IL with wafer

SYNTAX
ILW [Axis] [Value]

Parameters Necessary Param Description
Axis No Axis to report or set.
Value No Value to set to. (0 - 32 767)
Returned Values Return Error
0 No Error.
1
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
IL with wafer parameter for Servo PID loop. Must be between 0 and 32 767.

See also: KPW KDW KIW KP KD KI IL 

EXAMPLE

>IL
2500, 1500
>

INP#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report all or one Input

SYNTAX
INP [Input]

Parameters Necessary Param Description
Input No Specific input to report.
Returned Values Return Error
0 No Error.
1
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Report all or a specific input. Readable report can be enabled with ARM set to 2.

See also: ARM OUT 

EXAMPLE

>INP
0000
>

KD#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set KD

SYNTAX
KD [Axis] [Value]

Parameters Necessary Param Description
Axis No Axis to report or set.
Value No Value to set to. (0 - 32 767)
Returned Values Return Error
0 No Error.
1
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
KD parameter for Servo PID loop. Must be between 0 and 32 767.

See also: KP KI IL 

EXAMPLE

>KD
350, 350
>

KDW#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set KD with wafer

SYNTAX
KDW [Axis] [Value]

Parameters Necessary Param Description
Axis No Axis to report or set.
Value No Value to set to. (0 - 32 767)
Returned Values Return Error
0 No Error.
1
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
KD with wafer parameter for Servo PID loop. Must be between 0 and 32 767.

See also: KP KI IL 

EXAMPLE

>KDW
120, 400, 150
>

KI#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set KI

SYNTAX
KI [Axis] [Value]

Parameters Necessary Param Description
Axis No Axis to report or set.
Value No Value to set to. (0 - 32 767)
Returned Values Return Error
0 No Error.
1
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
KI parameter for Servo PID loop. Must be between 0 and 32 767.

See also: KP KD IL 

EXAMPLE

>KI
850, 250
>

KIW#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set KI with wafer

SYNTAX
KIW [Axis] [Value]

Parameters Necessary Param Description
Axis No Axis to report or set.
Value No Value to set to. (0 - 32 767)
Returned Values Return Error
0 No Error.
1
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
KI with wafer parameter for Servo PID loop. Must be between 0 and 32 767.

See also: KP KD IL KPW KDW ILW 

EXAMPLE

>KIW
5, 60, 20
>

KP#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set KP

SYNTAX
KP [Axis] [Value]

Parameters Necessary Param Description
Axis No Axis to report or set.
Value No Value to set to. (0 - 32 767)
Returned Values Return Error
0 No Error.
1
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
KP parameter for Servo PID loop. Must be between 0 and 32 767.

See also: KI KD IL 

EXAMPLE

>KP
50, 30
>

KPW#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set KP with wafer

SYNTAX
KPW [Axis] [Value]

Parameters Necessary Param Description
Axis No Axis to report or set.
Value No Value to set to. (0 - 32 767)
Returned Values Return Error
0 No Error.
1
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
KP with wafer parameter for Servo PID loop. Must be between 0 and 32 767.

See also: KI KD IL 

EXAMPLE

>KP
50, 30
>

MHP#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Move to Home Position

SYNTAX
MHP

Returned Values Return Error
0 No Error.
1
2 Device already running a System or User macro.
3 Interlock.
4 One or more axes servo loop is not enabled.
6 Device not homed.
8 No motor power.
10 Axis is outside of limit parameters.

DEVICE PRECONDITIONS
INITIALIZED, SERVO, HOMED

USAGE NOTES
Moves both axes to Home Positions. This is an asynchronous command and moves both axes at the same time.

See also: SON HOM 

EXAMPLE

>MHP
>0002

MTC#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Move To Chuck

SYNTAX
MTC

Returned Values Return Error
0 No Error.
1
2 Device already running a System or User macro.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Moves substrate to chuck, properly swapping vacuum channels on its way. This is an asynchronous motion command.

See also: MTP 

EXAMPLE

>MTC
>0002

MTP#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Move To Pins

SYNTAX
MTP

Returned Values Return Error
0 No Error.
1
2 Device already running a System or User macro.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Moves substrate to pins, properly swapping vacuum channels on its way. This is an asynchronous motion command.

See also: MTC 

EXAMPLE

>MTP
>0002

MVA#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Move Absolute

SYNTAX
MVA [Axis] [Position]

Parameters Necessary Param Description
Axis Yes Axis to move.
Position Yes Absolute position to move to.
Returned Values Return Error
0 No Error.
1
2 Device already running a System or User macro.
3 Interlock.
4 One or more axes servo loop is not enabled.
6 Device not homed.
7 Bad Parameter.
8 No motor power.
10 Axis is outside of limit parameters.

DEVICE PRECONDITIONS
INITIALIZED, SERVO, HOMED

USAGE NOTES
Move an axis to an absolute position.

See also: MVR SON HOM 

EXAMPLE

>RCP
4500, 4000
>MVA T 1000
>0002
>RCP
1000, 4000
>

MVR#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Move Relative

SYNTAX
MVR [Axis] [Value]

Parameters Necessary Param Description
Axis Yes Axis to move.
Value Yes Amount to move by.
Returned Values Return Error
0 No Error.
1
2 Device already running a System or User macro.
3 Interlock.
4 One or more axes servo loop is not enabled.
7 Bad Parameter.
8 No motor power.
10 Axis is outside of limit parameters.

DEVICE PRECONDITIONS
INITIALIZED, SERVO

USAGE NOTES
Move an axis by a relative amount.

See also: SON MVA 

EXAMPLE

>RCP
4500, 4000
>MVR T 1000
>0002
>RCP
5500, 4000
>

NOP#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Disable Power to Motors

SYNTAX
NOP

Returned Values Return Error
0 No Error.
1
3 Interlock.
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Disables power to motor amplifiers.

See also: POW SON SOF 

EXAMPLE

>NOP
>

OUT#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or Set Output

SYNTAX
OUT [Output] [Value]

Parameters Necessary Param Description
Output No Specific output to report or set.
Value No Value to set to specific output.
Returned Values Return Error
0 No Error.
1
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Report all or a specific output, or set a specific output. Readable report can be enabled with ARM set to 2.

See also: ARM INP 

EXAMPLE

>OUT
0000
>

PDN#

PREALIGNER AVAILABILITY
HFP-812

SUMMARY
Pins Down

SYNTAX
PDN

Returned Values Return Error
0 No Error.
1
2 Device already running a System or User macro.
5 .

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Moves pins down.

See also: PIN PUP MTP MTC 

EXAMPLE

>PDN
>0002

PIN#

PREALIGNER AVAILABILITY
HFP-812

SUMMARY
Pins state toggle.

SYNTAX
PIN

Returned Values Return Error
0 No Error.
1
2 Device already running a System or User macro.
5 .

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Toggles between pins up and pins down states.

See also: PDN PUP MTP MTC 

EXAMPLE

>PIN
>0002

POW#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Enable Power to Motors

SYNTAX
POW

Returned Values Return Error
0 No Error.
1
2 Device already running a System or User macro.
3 Interlock.
7 Bad Parameter.
12 In Service Mode.

DEVICE PRECONDITIONS
NONE

USAGE NOTES
Enables Power to Motors, first call also initializes the system. Essentially the same as SON but without enabling the servo loop.

See also: NOP SON SOF 

EXAMPLE

>POW
>

PUP#

PREALIGNER AVAILABILITY
HFP-812

SUMMARY
Pins Up

SYNTAX
PUP

Returned Values Return Error
0 No Error.
1
2 Device already running a System or User macro.
5 .

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Moves pins up.

See also: PDN PIN MTP MTC 

EXAMPLE

>PUP
>0002

PVF#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Pin Vacuum Off

SYNTAX
PVF

Returned Values Return Error
0 No Error.
1

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Disables Vacuum on Pins.

See also: PVN PVT CVN CVF CVT 

EXAMPLE

>PVF
>

PVN#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Pin Vacuum Enable

SYNTAX
PVN

Returned Values Return Error
0 No Error.
1

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Enables Vacuum on pins.

See also: PVF PVT CVN CVF CVT 

EXAMPLE

>PVN
>

PVT#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Pin Vacuum Toggle

SYNTAX
PVT

Returned Values Return Error
0 No Error.
1

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Toggles pin vacuum on/off.

See also: PVN PVF CVN CVF CVT 

EXAMPLE

>PVT
>

RADJ#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Adjust Wafer Position on the R axis by offset amount.

SYNTAX
RADJ [Offset]

Parameters Necessary Param Description
Offset Yes How much to move the wafer by.
Returned Values Return Error
0 No Error.
1
2 Device already running a System or User macro.
3 Interlock.
4 One or more axes servo loop is not enabled.
6 Device not homed.
7 Bad Parameter.
8 No motor power.
10 Axis is outside of limit parameters.

DEVICE PRECONDITIONS
INITIALIZED, SERVO, HOMED

USAGE NOTES
Moves the wafer by offset amount on the R axis at the current T position. Properly swaps between Wafer Transfer state and Correction state and swaps vacuum lines accordingly to configuration.

EXAMPLE

>RADJ 1000
>0002

RCP#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report Current Position

SYNTAX
RCP [Axis]

Parameters Necessary Param Description
Axis No Specific Axis
Returned Values Return Error
0 No Error.
1
5 .
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Reports the current position of all or a specific Axis.

EXAMPLE

// HFP-812
>RCP
18000, 4000
>
// HFP-312
>RCP
18000, 4000, 100
>

READP#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Read Axis Parameters

SYNTAX
READP

Returned Values Return Error
0 No Error.
1
3 Interlock.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES

Restores Axis Parameters from Flash.

Axis Parameters From code:

  • f_limit,
  • r_limit,
  • homing_mode,
  • home_offset,
  • home_custom,
  • home_speed,
  • home_accel,
  • unit_scale,
  • work_speed,
  • work_accel,
  • work_decel,
  • kp,
  • ki,
  • kd,
  • il,
  • error_limit,

See also: SAVEP SAVER READR 

EXAMPLE

>READP
>

READR#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Read Device Parameters

SYNTAX
READR

Returned Values Return Error
0 No Error.
1

DEVICE PRECONDITIONS
NONE

USAGE NOTES

Restores Device Parameters from Flash.

Device Parameters From code:

  • reserved, - reserved, - reserved, - reserved, - conection_baudrate, - polling_interval_hz, - robot_type, - serial, - home_vac_timeout, - pin_timeout, - async_response_mode, - mcdn_baudrate_scale, - aling_angle, - end_of_line, - wafer_transfer_mode, - scan_pos, - transfer_on_pins_offset, - transfer_on_chuck_offset, - vacuum_on_delay, - vacuum_off_delay, - adj_up_offset, - adj_down_offset, - pins_vac_enabled, - pins_pos_high, - pins_pos_low

See also: SAVER SAVEP READP 

EXAMPLE

>READR
>

RSA#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Restore Working Speed(s) and Acceleration

SYNTAX
RSA [Axis]

Parameters Necessary Param Description
Axis No Specific axis to restore.
Returned Values Return Error
0 No Error.
1
3 Interlock.
5 .
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Restores the Prealigner Axes’ Velocity, Acceleration, and Deceleration to the working set.

See also: HSA VEL ACC DEC 

EXAMPLE

>RSA
>

SAVEP#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Save Axis Parameters

SYNTAX
SAVEP

Returned Values Return Error
0 No Error.
1
3 Interlock.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES

Saves Axis Parameters to Flash.

Axis Parameters From code:

  • f_limit,
  • r_limit,
  • homing_mode,
  • home_offset,
  • home_custom,
  • home_speed,
  • home_accel,
  • unit_scale,
  • work_speed,
  • work_accel,
  • work_decel,
  • kp,
  • ki,
  • kd,
  • il,
  • error_limit,

See also: READP SAVER READR 

EXAMPLE

>SAVEP
>

SAVER#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Save Device Parameters

SYNTAX
SAVER

Returned Values Return Error
0 No Error.
1

DEVICE PRECONDITIONS
NONE

USAGE NOTES

Saves Device Parameters to Flash.

Device Parameters From code:

  • reserved, - reserved, - reserved, - reserved, - conection_baudrate, - polling_interval_hz, - robot_type, - serial, - home_vac_timeout, - pin_timeout, - async_response_mode, - mcdn_baudrate_scale, - aling_angle, - end_of_line, - wafer_transfer_mode, - scan_pos, - transfer_on_pins_offset, - transfer_on_chuck_offset, - vacuum_on_delay, - vacuum_off_delay, - adj_up_offset, - adj_down_offset, - pins_vac_enabled, - pins_pos_high, - pins_pos_low

See also: READR SAVEP READP 

EXAMPLE

>SAVER
>

SCAN#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Perform a scanning operation

SYNTAX
SCAN

Returned Values Return Error
0 No Error.
1
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED, SERVO, HOMED

See also: SDATA 

EXAMPLE

>SCAN
Total Samples : 2755
Offset angle  :-9541
Offset micron: -6
Notch angle: 26990
Corrected notch angle: -9009

SDATA#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Reports Scanning Data

SYNTAX
SDATA

Returned Values Return Error
0 No Error.
1
2 Device already running a System or User macro.
7 Bad Parameter.

DEVICE PRECONDITIONS
NONE

USAGE NOTES
Format: (index), (encoder), (ccd).

See also: SCAN 

EXAMPLE

>SDATA
1194, 26477, 2072
1195, 26510, 2071
1196, 26542, 2072
1197, 26576, 2071

SNR#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Reports the Serial Number of the prealigner.

SYNTAX
SNR

Returned Values Return Error
0 No Error.
1

DEVICE PRECONDITIONS
NONE

EXAMPLE

>SNR
1000
>

SOF#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Disables the servo loop.

SYNTAX
SOF [Axis]

Parameters Necessary Param Description
Axis No Specific axis to disable the servo loop to.
Returned Values Return Error
0 No Error.
1
3 Interlock.
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Disables the servo loop to all axes or only to the specific axis requested.

See also: SON POW NOP 

EXAMPLE

>SOF
>

SON#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Initializes the system, enables Motor power, and enables Servo loop

SYNTAX
SON [Axis]

Parameters Necessary Param Description
Axis No Axis to enable the Servo Loop on.
Returned Values Return Error
0 No Error.
1
2 Device already running a System or User macro.
3 Interlock.
4 One or more axes servo loop is not enabled.
7 Bad Parameter.
8 No motor power.
12 In Service Mode.

DEVICE PRECONDITIONS
NONE

USAGE NOTES
Enables the servo loop. First use of SON will initialize the system, enabling the MCDN network. Once initialized, it will enable the Motor power, if its not on, for all axes. Even if only one axis is requested. After all this is done, it will enable the servo loop to all axes or only to the requested axis.

See also: SOF POW NOP 

EXAMPLE

>SON
>

STA#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report Prealigner Status

SYNTAX
STA [Axis]

Parameters Necessary Param Description
Axis No Specific Axis Status
Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS
NONE

USAGE NOTES

Flags Description
0x1 Not homed
0x2 At target
0x4 Velocity streaming
0x8 Index
0x10 Position Limit Exceeded
0x20 Position Error Exceeded
0x40 Reserved (possible encoder error)
0x80 No servo
0x100 Macro running
0x200 Accel done
0x400 Position wrap around
0x800 Inhibit
0x1000 Reserved (possible polling task overrrun)
0x2000 Over current
0x4000 E-stop
0x8000 No power

EXAMPLE

>STATUS
0082
>

STOP#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Stop all motion and running macros.

SYNTAX
STOP

Returned Values Return Error
0 No Error.

DEVICE PRECONDITIONS
NONE

USAGE NOTES
Stop any motion commands from executing and exit out of all macros running in the background.

EXAMPLE

>STOP
>

UPR#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set Units Per Revolution of encoder.

SYNTAX
UPR [Axis] [Value]

Parameters Necessary Param Description
Axis No Axis to report or set.
Value No Value to set to.
Returned Values Return Error
0 No Error.
5 .
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

EXAMPLE

// HFP-812
>UPR
36000, 4000
>
// HFP-312
>UPR
36000, 4000, 4000
>

VEL#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Report or set velocity.

SYNTAX
VEL [Axis] [Value]

Parameters Necessary Param Description
Axis No Axis to report or set.
Value No Value to set to.
Returned Values Return Error
0 No Error.
1
3 Interlock.
5 .
7 Bad Parameter.

DEVICE PRECONDITIONS
INITIALIZED

USAGE NOTES
Report or set an Axis’ current velocity. Issuing a SAVEP after setting to a new value will save over the working speed.

See also: ACC DEC 

EXAMPLE

// HFP-812
>VEL
72000, 8000
>
// HFP-312
>VEL
72000, 8000, 2000
>

VER#

PREALIGNER AVAILABILITY
HFP-812, HFP-312

SUMMARY
Reports firmware version.

SYNTAX
VER

Returned Values Return Error
0 No Error.
1

DEVICE PRECONDITIONS
NONE

EXAMPLE

>VER
1.0.0-26 Oct 2022
>