ALN#
PREALIGNER AVAILABILITY
HFP-812, HFP-312
SUMMARY
Perform center sequence and orient wafer to specific angle.
SYNTAX
ALN [Angle]
| Parameters | Necessary Param | Description |
|---|---|---|
| Angle | No | Relative offset T-Axis coordinate from sensor to orient wafer notch. |
| Returned Values | Return Error |
|---|---|
| 0 | No Error. |
| 3 | Interlock. |
| 4 | One or more axes servo loop is not enabled. |
| 7 | Bad Parameter. |
| 8 | No motor power. |
DEVICE PRECONDITIONS
SERVO ENABLED
See also: SCAN, _SA
EXAMPLE
>ALN
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