MTC#
PREALIGNER AVAILABILITY
HFP-812, HFP-312
SUMMARY
Move To Chuck
SYNTAX
MTC
| Returned Values | Return Error |
|---|---|
| 0 | No Error. |
| 1 | |
| 2 | Device already running a System or User macro. |
DEVICE PRECONDITIONS
INITIALIZED
USAGE NOTES
Moves substrate to chuck, properly swapping vacuum channels on its way. This is an asynchronous motion command.
See also: MTP
EXAMPLE
>MTC
>0002