RADJ#
PREALIGNER AVAILABILITY
HFP-812, HFP-312
SUMMARY
Adjust Wafer Position on the R axis by offset amount.
SYNTAX
RADJ [Offset]
| Parameters | Necessary Param | Description |
|---|---|---|
| Offset | Yes | How much to move the wafer by. |
| Returned Values | Return Error |
|---|---|
| 0 | No Error. |
| 1 | |
| 2 | Device already running a System or User macro. |
| 3 | Interlock. |
| 4 | One or more axes servo loop is not enabled. |
| 6 | Device not homed. |
| 7 | Bad Parameter. |
| 8 | No motor power. |
| 10 | Axis is outside of limit parameters. |
DEVICE PRECONDITIONS
INITIALIZED, SERVO, HOMED
USAGE NOTES
Moves the wafer by offset amount on the R axis at the current T position. Properly swaps between Wafer Transfer state and Correction state and swaps vacuum lines accordingly to configuration.
EXAMPLE
>RADJ 1000
>0002