Type 1 - User Guide

Wafer Transfer Robot (Type 1) #

Station Editor Screen #

In the station editor the user can:

1. See all available station. (ens *)
2. View and edit selected station parameters. (spar *)
3. Delete a station. (sclear *)
4. Add new station. (newstn *)

CAUTION: In order to be saved for use after the robot has been restarted, the modified parameters must be saved. This can be done from the Action Bar by selecting the Storage > Save to Flash.

Add Station Panel #

newstn*

Through this panel the user can create a new station.

The following initial parameters must be specified:

1. Station Label: Select from A-Z or a-z.
2. Cassette Type: Select from standard wafer sizes.
   (For non-standard cassette, use “Custom” type)
3. EE Number: (For dual-arm robots) Select between Arm 1 or Arm 2.
4. Station Orientation: Select between Radial or Inline.
5. Flipper Orientation Select between “up” or “down”
   

   up	The End-Effector picks up the wafer (substrate) from the bottom.
   down	The End-Effector picks up the wafer (substrate) from the top.

NOTE: The added station defaults to a safe position. To set the Robot to the current or any other position edit the Station after adding it by using the Station Editor controls.

Edit Station Panel #

In order to edit the current selected station:

1. Click Edit to enter editing mode, this will make the properties editable.
2. If you wish to use the current Robot position as a station position press the Use current robot pos button.
3. You can create your own position by changing the parameters.
4. For saving the changes you made press the Apply button.

WARNING: Editing the parameters will have an immediate effect on the Robot after pressing the “Apply” button. CAUTION: In order to be saved for use after the robot has been restarted, the modified parameters must be saved. This can be done from the Action Bar by selecting the Storage > Save to Flash.

Station Tester Screen #

WARNING: Use Station Tester CAREFULLY. The RCC Station Tester does not include any preventions against damaging wafer (substrate) or End-Effector.

In order to test the station parameters your Robot must be Homed and have its Motors turned On. Make sure that Homing is possible before performing Home operation.

This can be done one of three ways:

• In the Action Bar select Robot > Home
• On the Dashboard Screen press Home in the Options panel.
• On the Terminal Screen type command HOME.

Station Tester provides the following testing capabilities:

1. Moving the Robot to Retract Position. (mtr *)
2. Moving the Robot to Slot Position. (mtp *)
3. Picking up Wafers. (get *)
4. Placing Wafers. (put *)
5. Interrupting any robot movements and operations by using the “STOP” button. (stop)
6. Controlling the Robot’s speed by the Speed Selector.

After testing if your are satisfied with the results you can permanently save all Station Parameters with the Robot > Save to Flash. In case you want to discard all modification and restore the lastly saved parameters you can do that with the Robot > Restore from Flash.

Dashboard Screen #

The status bar provides real time information about:

• Active Robot connections.
• Robot State and Active Alarm. (STA *)
• Active log of events relating to robot and software.
• Homing robot to zero position. (HOME)
• Toggling servo motors on or off. (SERVOON, SERVOOFF)

Terminal Screen #

The terminal panel allows specific users to communicate and interact directly with the robot using pre-set commands.

NOTE: For more information on commands look at Command Reference.