Command Reference
List of all available terminal commands for ATM, HF, and CR robots.
Station Teaching Procedure
Procedure # (Parameters) are necessary. [Parameters] are optional. Teaching involves six steps.
Wafer Mapping Reference
Reference for Wafer Mapping Procedure and Commands.
Status Report
Status Report #There are predefined command providing status for different positions or work flows of the robot arms and station.
Stations Overview
Station Characteristics #The main function of the wafer handling robot is transferring substrates from one location to another.
Software Architecture
This manual describes the Wafer Transfer control software. The document includes description of the controller architecture, host communication protocol, robot operations and command reference.
Motion Parameters Management
Motion Parameters Definition #Description of predefined robot motions and their parameters
System Control
Generic Motion Commands #Basic motion commands used to readjust robot arm based on current or specific position.
Communication Protocol
Manual detailing communication protol over raw TCP sockets or serial port.
Safety
Installation, regulatory, and environmental requirements.