Command Groups #

Motion Commands #

ACC, DEC, FLIP, FLIPDN, FLIPUP, HOME, HSA, JSA, MHP, MVA, MVL, MVR, RCP, RSA, SERVOOFF, SERVOON, STOP, VEL, VPG

General Commands #

DELAY, EVCLOSE, EVOPEN, READP, RESET, SAVEP

Station Teaching #

MTA, MTP, MTR, MTS, NEWSTN, READS, SANG, SAVES, SCLEAR, SCLEARALL, SDLY, SDPT, SEEN, SEEO, SINL, SMAX, SPAR, SPCH, SPOS, SRET, SSPOS, SSTR, STIM, SVC, SVCEN, SVCRE, TEACH, TEACHSCAN, TEACHZHIGH, TEACHZLOW

Station Operating #

ENS, GET, PUT, SCAN, SMAP

Reporting Commands #

AUXERR, ARM, HISTORY, HSTATUS, ISTATUS, OSTATUS, SDATA, SN, STATUS, VER

All Commands #

ACC #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Reports the current acceleration of each axis.

SYNTAX
ACC [Axis] [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
When used without parameters reports the current acceleration for all axes.
When an Axis parameter is provided without a Value, reports the acceleration for that specific Axis. When Axis and Value parameters are provided, sets the acceleration parameter to the Value for the specific Axis.

EXAMPLE

>ACC
48000,24000,5000
>ACC Z 10000

>ACC
48000,24000,10000
>

ARM #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Reports or sets the asynchronous response mode.

SYNTAX
ARM [Mode]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports or sets the asynchronous response mode. Determines how the robot responds when an asynchronous macro finishes executing. Also effects STATUS.

EXAMPLE

>ARM 1

>STATUS
0093

>ARM 2

>STATUS
Not Homed
Move Done
Software Limit
Servo Off

>

AUXERR #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports out auxillary error status.

SYNTAX
AUXERR

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports the status bits in hexadecimal format of auxillary errors that may be returned by Station Operating Commands. Each new execution of a station operating command resets the auxillary errors.

EXAMPLE

>AUXERR
0000
>

DEC #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Reports the current deceleration of each axis.

SYNTAX
DEC [Axis] [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
When used without parameters reports the current deceleration for all axes.
When an Axis parameter is provided without a Value, reports the deceleration for that specific Axis. When Axis and Value parameters are provided, sets the deceleration parameter to the Value for the specific Axis.

EXAMPLE

>DEC
48000,24000,5000
>DEC Z 10000

>DEC
48000,24000,10000
>

DELAY #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Delays program execution in current thread.

SYNTAX
DELAY [Time]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Typically used when programming user macros. Delay returns after the requested amount of time has elapsed. Not recommended for anything less than 10 milliseconds.

EXAMPLE

>DELAY 1000

>

ENS #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports taught stations (ENumerate Stations).

SYNTAX
ENS

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports the currently taught stations. ENS stands for ENumerate Stations.

See also Station Teaching or Station Operating.

EXAMPLE

>ENS
ABVvz
>

EVCLOSE #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Closes vaccum valves, disabling suction.

SYNTAX
EVCLOSE [Arm]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Used to manually close valves. Particularly useful when writing macros that do not use GET or PUT for operation. Command will not accept 1 as a parameter when a flipper is installed on an ATM robot.

EXAMPLE

>EVCLOSE
>

EVOPEN #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Opens vaccum valves, enabling suction.

SYNTAX
EVOPEN [Arm]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Used to manually open valves. Particularly useful when writing macros that do not use GET or PUT for operation. Command will not accept 1 as a parameter when a flipper is installed on an ATM robot.

EXAMPLE

>EVOPEN
>

FLIP #

ROBOT AVAILABILITY
ATM

SUMMARY
Toggles a flip motion.

SYNTAX
FLIP

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Used to toggle a flip motion, flipping either up or down, depending on current state.

See also FLIPUP and FLIPDN for specific flip direction.

EXAMPLE

>FLIP

>0102

>

FLIPDN #

ROBOT AVAILABILITY
ATM

SUMMARY
Toggles a flip down motion.

SYNTAX
FLIPDN

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Used to toggle a flip motion to the down state. Does nothing if already in the down state.

See also FLIP and FLIPUP for specific flip direction.

EXAMPLE

>FLIPDN

>0102

>

FLIPUP #

ROBOT AVAILABILITY
ATM

SUMMARY
Toggles a flip up motion.

SYNTAX
FLIPUP

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Used to toggle a flip motion to the up state. Does nothing if already in the up state.

See also FLIP and FLIPDN for specific flip direction.

EXAMPLE

>FLIPUP

>0102

>

GET #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Executes GET motion to get a substrate from a station slot.

SYNTAX
GET [Station] [Slot]

ROBOT PRECONDITIONS
HOMED SERVO ENABLED

USAGE NOTES
Executes GET motion to pickup substrate from a taught station slot. Robot checks for substrate presence on arm taught with station prior to moving.
See laso PUT.

EXAMPLE

>GET V 1

>0102
?

HISTORY #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Reports a list of used commands.

SYNTAX
HISTORY

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports a list of used commands with time used from start of robot to end of process or current usage time.

EXAMPLE

>HISTORY
Timer 0.008     Macro           READP
Timer 0.080     Macro           RSA 3
Timer 0.128     Macro           READS
Timer 17.168    Macro           SERVOON NA
Timer 35.968    Macro           RCP NA
Timer 39.920    Macro           HISTORY
>

HOME #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Homes the robot, allowing absolute position movement.

SYNTAX
HOME [Axis]

ROBOT PRECONDITIONS
SERVO ENABLED

USAGE NOTES
Homes robot axes (or axis if parameter is passed), enabling movement to absolute positions.

See also MVA, MHP.

EXAMPLE

>HOME

>0103
>RCP
0,-5000,-5000,0
> 

HSA #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Restore Speed and Acceleration.

SYNTAX
HSA

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Applies robot homing speed and aceleration parameters from memory.

Will overwrite any changes to parameters not saved.
Do not execute while the robot is in motion. May affect the robot’s behavior during the motion.
See also JSA, RSA.

EXAMPLE

>VEL
9000,6000,1000
>HSA
>VEL
1800,1200,200
> 

HSTATUS #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Reports robot homed status.

SYNTAX
HSTATUS

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports whether or not the robot has been homed.

EXAMPLE

>HSTATUS
1
>

ISTATUS #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Reports robot inputs status as a hexidecimal value.

SYNTAX
ISTATUS

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports the current inputs status in hexidecimal format.

>ISTATUS
0013
>

JSA #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Restore Speed and Acceleration.

SYNTAX
JSA

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Applies robot jogging speed and aceleration parameters from memory.

Will overwrite any changes to parameters not saved.
Do not execute while the robot is in motion. May affect the robot’s behavior during the motion.
See also HSA, RSA.

EXAMPLE

>VEL
18000,12000,2000
>JSA
>VEL
9000,6000,1000
> 

MHP #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Move to home position.

SYNTAX
MHP

ROBOT PRECONDITIONS
HOMED SERVO ENABLED

USAGE NOTES
Moves robot to home position. This does not switch to homing speed set to execute.
See also HOME

EXAMPLE

>RCP
18000,12000,2000
>MHP

>0102
>RCP
0,-5000,0
>

MTA #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Moves to Approach position of a taught station slot (Pickup position - Depth).

SYNTAX
MTA [Station] [Slot] [Z-Offset]

ROBOT PRECONDITIONS
HOMED SERVO ENABLED

USAGE NOTES
Executes motion to position the robot in Approach postition of a specified station slot. Which is the Pickup position with the R axis (T as well on in-line stations) offset by the depth of the station. Checks for wafer presence prior to moving.
See laso MTP, MTR, MTS.

EXAMPLE

>SPOS V
3500,7000,1000
>SDPT V
6000
>MTA V 1

>0102
>RCP
3500,1000,1000
>

MTP #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Moves to Pickup position of a taught station slot.

SYNTAX
MTP [Station] [Slot] [Z-Offset]

ROBOT PRECONDITIONS
HOMED SERVO ENABLED

USAGE NOTES
Executes motion to position the robot in Pickup postition of a specified station slot. Checks for wafer presence prior to moving.
See laso MTA, MTR, MTS.

EXAMPLE

>SPOS V
3500,7000,1000
>MTP V 1

>0102
>RCP
3500,7000,1000
>

MTR #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Moves to Retract position of a taught station slot.

SYNTAX
MTR [Station] [Slot] [Z-Offset]

ROBOT PRECONDITIONS
HOMED SERVO ENABLED

USAGE NOTES
Executes motion to position the robot in Retract postition of a taught station slot.
See laso MTA, MTP, MTS.

EXAMPLE

>SPOS V
3500,7000,1000
>SPAR V 5
-6500
>MTR V 10

>0102
>RCP
3500,-6500,3000
>

MTS #

ROBOT AVAILABILITY
ATM

SUMMARY
Moves to Scanning position of a taught station.

SYNTAX
MTS [Station] [Z-Position]

ROBOT PRECONDITIONS
HOMED SERVO ENABLED

USAGE NOTES
Executes motion to position the robot in Scanning postition of a taught station. Taught position is lowest position of lowest slot that detects the bottom of the substrate. Z-LOW position is where the sensor is below the taught position where the sensor no longer detects the substrate. Z-HIGH position is above the top most slot and the sensor no longer detects a substrate. For manually defined scanning positions, station parameter 37 must be set to 1 to consider Scanning positions taught.
See laso TEACHSCAN, SSPOS, SCAN, SPAR

EXAMPLE

>SSPOS V
15432,-7123,1033
>MTS V 

>0102
>RCP
15432,-7123,1033
>

MVA #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Move an axis to an absolute position.

SYNTAX
MVA [Axis] [Amount]

ROBOT PRECONDITIONS
HOMED
SERVO ENABLED

USAGE NOTES
Move an axis to an absolute position.

See also MVR.

EXAMPLE

>RCP
0,0,0
>MVA T 1000

>0103
>RCP
1000,0,0
>MVA T -5000

>0103
>RCP
-5000,0,0
>

MVL #

ROBOT AVAILABILITY
ATM

SUMMARY
Move an arm axis in a line.

SYNTAX
MVL [Length] [Angle] [Arm] [Segments] [Blending]

ROBOT PRECONDITIONS
HOMED
SERVO ENABLED

USAGE NOTES
Move an R axis in a line relative from current R position. The line can be non-radial to robot origin and takes End Effector length into consideration.

Blending of the motion is not recommended with values less than 50. Blending allows the robot to execute the full line without pausing at the end of each segment.

For example:

If EE-Length is 0.
Robot coordinates are (T=9000, R=5000, Z=0).
We want to move 5000 R units toward T = 0 direction.
Executing MVL 5000 0 will bring the robot coordinates to (T=4500, R=7071, Z=0).

If EE-Length is 2500.
Robot coordinates are (T=9000, R=2500, Z=0).
We want to move 5000 R units toward T = 0 direction.
Executing MVL 5000 0 will bring the robot coordinates to (T=4500, R=4571, Z=0).

EXAMPLE

>RCP
9000,5000,0
>MVL 5000 0

>0103
>RCP
4500,7071,0
>

MVR #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Move an axis relatively from current position.

SYNTAX
MVR [Axis] [Amount]

ROBOT PRECONDITIONS
SERVO ENABLED

USAGE NOTES
Move an axis to an absolute position.

See also MVA.

EXAMPLE

>RCP
0,0,0
>MVR T 1000

>0103
>RCP
1000,0,0
>MVR T -500

>0103
>RCP
500,0,0
>

NEWSTN #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Initializes a station or replaces parameters with default parameters for specific wafer size.

SYNTAX
NEWSTN [Station], [Wafer Size], [In-Line]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Initializes a station with default parameters, making it ready for teaching. It can also replace parameters of an existing station with that of default parameters for a specific wafer size, allowing the reteaching of a new station over an old one without the need of deleting it first.

Do not overwrite parameters of a station while the robot is in motion.
See also Station Teaching.

EXAMPLE

>NEWSTN G
>

OSTATUS #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Reports robot outputs status as a hexidecimal value.

SYNTAX
OSTATUS

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports the current outputs status in hexidecimal format.

EXAMPLE

>OSTATUS
0011
>

PUT #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Executes PUT motion to place a substrate to a station slot.

SYNTAX
PUT [Station] [Slot]

ROBOT PRECONDITIONS
HOMED SERVO ENABLED

USAGE NOTES
Executes PUT motion to place a substrate to a taught station slot.
See laso GET.

EXAMPLE

>PUT V 1

>0102
>

RCP #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Reports robot current position to terminal.

SYNTAX
RCP [Axis]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports the coordinates of each axis.

EXAMPLE

>RCP T
1290
>RCP
1290,-2000,1020
>

READP #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Reads robot axis parameters from PARS-M.DAT file.

SYNTAX
READP

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reads and applies robot axis parameters from file. This includes calibration, speed, etc.

Will overwrite any changes to parameters not saved.
Do not execute while the robot is in motion. May affect the robot’s behavior during the motion.
See also SAVEP.

EXAMPLE

>READP
>

READS #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reads robot station parameters from PARS-S.DAT file.

SYNTAX
READS

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reads and applies robot station parameters from file.

Will overwrite any changes to parameters not saved.
Do not execute while the robot is in motion. May affect the robot’s behavior during the motion.
See also SAVES.

EXAMPLE

>READS
>

RESET #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Turns off power to motors and resets the computer.

SYNTAX
RESET

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Turns off the power to motors and resets the computer.
Any unsaved changes will be lost!
Do not execute while the robot is in motion. May affect the robot’s behavior during the motion.

EXAMPLE

>RESET
>

RSA #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Restore Speed and Acceleration.

SYNTAX
RSA [Level]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Applies robot working speed and aceleration parameters from memory.

Will overwrite any changes to parameters not saved.
Do not execute while the robot is in motion. May affect the robot’s behavior during the motion.
See also HSA, JSA.

EXAMPLE

>VEL
9000,6000,1000
>RSA
>VEL
18000,12000,2000
> 

SANG #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets Station Angle parameter.

SYNTAX
SANG [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Station Angle utility macro. Used to report or change the Angle of an existing station. Used in in-line stations and its the same coordinate space as the T axis.
Example: For a radial station at T=0, the angle of the station would be 18000 for 180 degrees, facing the center of the robot. This would be the same angle for an in-line station thats at T=1200 and is parallel to the radial station.

Changes to stations are not permanent until SAVES is called.

Do not change station parameters while the robot is in motion, this may lead to unexpected behavior.
See also SPAR.

EXAMPLE

>SANG V
0
>SANG V 18000

>SANG V
18000
>

SAVEP #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Saves robot parameters to the file PARS-M.DAT .

SYNTAX
SAVEP

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Saves robot axis parameters to file making changes last after reboot. This includes calibration perameters, working speeds, etc.

This will overwrite the file, make a backup before saving or changes will be irreversible.

See also READP.

EXAMPLE

>SAVEP

>

SAVES #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Saves robot parameters to the file PARS-M.DAT .

SYNTAX
SAVES

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Saves robot station parameters to file making changes last after reboot.

This will overwrite the file, make a backup before saving or changes will be irreversible.

See also READS.

EXAMPLE

>SAVES

>

SCAN #

ROBOT AVAILABILITY
ATM

SUMMARY
Scans a taught station.

SYNTAX
SCAN [Station] [Double-Pass]

ROBOT PRECONDITIONS
HOMED SERVO ENABLED

USAGE NOTES
Executes Scanning procedure. For manually defined scanning positions, station parameter 37 must be set to 1 to consider Scanning positions taught.
See laso TEACHSCAN, SSPOS, MTS, SPAR, SMAP

EXAMPLE

>SSPOS V
-15540,-6278,1035
>SCAN V

>0102
>RCP
-15540,-6278,7285
>SCAN V 1

>0102
>RCP
15540,-6278,785
>SMAP
0000000000000000000000000
>

SERVOOFF #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Disables the servo loop, disabling motion commands.

SYNTAX
SERVOOFF [Axis]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Stops the Servo loop of one or all Axes, disabling motion commands but allowing the movement of the robot by hand if necessary. Also turns off the power the motors (encoders are still powered). Do not use while the robot is in motion, this may lead to unexpected behavior.

See also SERVOON.

EXAMPLE

>SERVOOFF

>

SERVOON #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Enables the servo loop, allowing motion commands to be executed.

SYNTAX
SERVOON [Axis]

ROBOT PRECONDITIONS
No encoder errors.
Robot is not in EMO state.
EStop input state is not enabled.

USAGE NOTES
Starts the Servo loop of one or all Axes, enabling motion commands.

See also SERVOOFF.

EXAMPLE

>SERVOON

>

SCLEAR #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Deletes a station.

SYNTAX
SCLEAR [Station]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Deletes a taught station from the robot. Changes to stations are not permanent until SAVES is called.

See also Station Teaching.

EXAMPLE

>SCLEAR V

>

SCLEARALL #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Deletes all stations from the robot.

SYNTAX
SCLEARALL

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Deletes all taught stations from the robot. Changes to stations are not permanent until SAVES is called.

See also Station Teaching.

EXAMPLE

>SCLEARALL

>

SDATA #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports Scan Data from last scan.

SYNTAX
SDATA [Sample Set]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports the number of samples in a set, followed by the samples.
Samples are measurements in Z-axis coordinate units.

EXAMPLE

>SDATA
0
0

>SCAN V

>0102

>SDATA
4
1232
1238
1256
1263
0

>

SDLY #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets Station Delay parameter.

SYNTAX
SDLY [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Station Delay utility macro. Used to report or change the Delay in milliseconds which is used as a “resting” time to ensure the vacuum grip is secured or released prior to moving the end effector out of the station.

Changes to stations are not permanent until SAVES is called.

Do not change station parameters while the robot is in motion, this may lead to unexpected behavior.
See also SPAR.

EXAMPLE

>SDLY V
2500
>SDLY V 1000

>SDLY V
1000
>

SDPT #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets station depth parameter.

SYNTAX
SDPT [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Station depth utility macro. Used to change the depth of an existing station. Essential for inline station calculations.
Changes to stations are not permanent until SAVES is called.

Do not change station parameters while the robot is in motion, this may lead to unexpected behavior.
See also SPAR.

EXAMPLE

>SDPT V
500
>SDPT V 2000

>SDPT V
2000
>

SEEN #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets Station End Effector Number parameter.

SYNTAX
SEEN [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Station End Effector Number utility macro. Used to change the EE Number of an existing station.
Changes to stations are not permanent until SAVES is called.

Do not change station parameters while the robot is in motion, this may lead to unexpected behavior.
See also SPAR.

EXAMPLE

>SEEN V
0
>SEEN V 1

>SEEN V
1
>

SEEO #

ROBOT AVAILABILITY
ATM

SUMMARY
Reports or sets Station End Effector Orientation parameter.

SYNTAX
SEEO [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Station End Effector Orientation utility macro. Used to report or change the Orientation of stations when configured with a gripper. 1 is regular orientation, and 0 is upside down.

Changes to stations are not permanent until SAVES is called.

Do not change station parameters while the robot is in motion, this may lead to unexpected behavior.
See also SPAR.

EXAMPLE

>SEEO V
1
>SEEO V 0

>SEEO V
0
>

SINL #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets Station Delay parameter.

SYNTAX
SINL [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Station Inline utility macro. Used to report or change the Inline parameter which determines if a station is inline (1) or radial (0).

Changes to stations are not permanent until SAVES is called.

Do not change station parameters while the robot is in motion, this may lead to unexpected behavior.
See also SPAR.

EXAMPLE

>SINL V
0
>SINL V 1

>SINL V
1
>

SMAP #

ROBOT AVAILABILITY
ATM

SUMMARY
Reports scanning results from last scan procedure.

SYNTAX
SMAP

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports scanning results from last scanning procedure.

Interpretation of scanning samples is determined by Station Pitch and Station Max Thickness parameters.

* - Scanning locates edges of substrates. Therefore detecting one wafer requires 2 samples, one for each edge. Unknown mapping code happens when an odd number of edges were detected during scanning. This may require reteaching Z-Low or Z-High so that the sensor does not detect an edge when it reaches either of the mentioned coordinates.

EXAMPLE

>SMAP
0101020440004400100100010
>

SMAX #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets Station Max Slots parameter.

SYNTAX
SMAX [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Station Max Slots utility macro. Used to report or change the maximum station slots.

A station with Max Slots value of 0 or less is considered untaught and will not be reported by SPOS or ENS.

Changes to stations are not permanent until SAVES is called.

Do not change station parameters while the robot is in motion, this may lead to unexpected behavior.
See also SPAR.

EXAMPLE

>SMAX V
25
>SMAX V 15

>SMAX V
15
>

SN #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Reports the Serial Number of the robot.

SYNTAX
SN

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports the Serial Number of the robot, typically for logging purposes.

EXAMPLE

>SN
1337
>

SPAR #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets a station parameter.

SYNTAX
SPAR [Station] [Parameter ID] [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Typically used for fine tuning station parameters that do not have a corresponding utility macro. However, all parameters are made available through SPAR. See Station Teaching
Parameters are not saved and only valid until reboot. See SAVES.
Do not change parameters while the robot is in motion.

The table below lists available station parameter and their description.

EXAMPLE

>ENS
Vv
>SPAR V 3
25
>SPAR V 3 20

>SPAR V 3
20
>

SPCH #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets Station Pitch parameter.

SYNTAX
SPCH [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Station Pitch utility macro. Used to report or change the Pitch of an existing station.
The Pitch units are 10 000 units to 1 Inch. so a pitch of 0.1875 inches would be 1875 in robot units. or 0.25 would be 2500.

Changes to stations are not permanent until SAVES is called.

Do not change station parameters while the robot is in motion, this may lead to unexpected behavior.
See also SPAR.

EXAMPLE

>SPCH V
1875
>SPCH V 2500

>SPCH V
2500
>

SPOF #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets Station Pick Offset parameter.

SYNTAX
SPOF [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Station Pick Offset utility macro. Used to report or change the vertical Pick Offset of an existing station.
The Pick Offset is the position above the substrate that clears the End Effector to retract together with the substrate.

The algorithm used is: Station Position + Pick Offset - Stroke.
Pick Offset determines above position.
Stroke determines below position from above position.

Changes to stations are not permanent until SAVES is called.

Do not change station parameters while the robot is in motion, this may lead to unexpected behavior.
See also SPAR, SPOS, SSTR.

EXAMPLE

>SPOF V
60
>SPOF V 75

>SPCH V
75
>

SPOS #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets a station’s pickup coordinates.

SYNTAX
SPOS [Station], [Axis], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
When used with just the Station parameter, reports station’s taught pickup coordinates. This is the position just touching the substrate just below or when configured with a flipper, just above, depending on the station orientation. (SEEO).
When used with the Station and Axis parameters, reports the position of the specific axis requested.
When used with Station, Axis, and Value parameters, sets the specific Axis positon to the Value of the specific Station.

See also Station Teaching.

EXAMPLE

>ENS
Vav
>SPOS v
-2492,5898,1547
>SPOS v Z 1650

>SPOS v
-2492,5898,1650
>

SRET #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets Station Retract Position parameter.

SYNTAX
SRET [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Station Retract Position utility macro. Used to report or change the Retract Position of the R axis or both axes in dual arm configurations.

In Dual Arm configurations, the arm that is not in use will move to the retract position.

Changes to stations are not permanent until SAVES is called.

Do not change station parameters while the robot is in motion, this may lead to unexpected behavior.
See also SPAR.

EXAMPLE

>SRET V
-5000
>SRET V -5500

>SRET V
-5500
>

SSPOS #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets a station’s scanning coordinates.

SYNTAX
SSPOS [Station], [Axis], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
When used with just the Station parameter, reports station’s scanning coordinates. This position should be under the bottom most substrate and clear from obstruction to prevent a false detection at the start of the procedure.
When used with Station and Axis parameter, reports the specific Axis position.
When used with Station, Axis, and Value parameter, sets the Axis position to the Value.

See also SCAN, MTS, SMAP.

EXAMPLE

>ENS
Vav
>SSPOS V
1000,-2000,1000
>SSPOS V Z 989

>SSPOS V
1000,-2000,989
>

SSTR #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets Station Stroke parameter.

SYNTAX
SSTR [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Station Stroke utility macro. Used to report or change the vertical Stroke of an existing station.
The Stroke is the movement from below the substrate to just above it where it is clear for the End Effector to pull out with the substrate.

The algorithm used is: Station Position + Pick Offset - Stroke.
Pick Offset determines above position.
Stroke determines below position from above position.

Changes to stations are not permanent until SAVES is called.

Do not change station parameters while the robot is in motion, this may lead to unexpected behavior.
See also SPAR, SPOS, SSTR.

EXAMPLE

>SSTR V
110
>SSTR V 120

>SSTR V
120
>

STATUS #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Reports robot operating status.

SYNTAX
STATUS

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports the current operating status of the robot.

*The status bit represents cumulative state of all axes. One or more of the robot axes has the indicated condition.

EXAMPLE

>STATUS
0080
>

STIM #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets Station Timeout parameter.

SYNTAX
STIM [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Station Timeout utility macro. Used to report or change the Timeout in milliseconds which is used as as a time limit when seeking for substrate presence on the End Effectors.

Changes to stations are not permanent until SAVES is called.

Do not change station parameters while the robot is in motion, this may lead to unexpected behavior.
See also SPAR.

EXAMPLE

>STIM V
1000
>STIM V 1200

>STIM V
1200
>

STOP #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Halts the robot interrupting Macro execution and stopping any motion currently executing.

SYNTAX
STOP

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Halts the robot interrupting Macro execution and stopping any motion currently executing.
This command does not replace a physical E-STOP or EMO condition but is useful to have.
One example would be interrupting infinite loops, such as those used in benchmarking macros.

EXAMPLE

>Completed cycle: 3
0103
?0103
>0103
?0103
>0103
?0103
>0103
?0103
>Completed cycle: 4
0103
?0103
>stop
0103
>

SVC #

ROBOT AVAILABILITY
ATM

SUMMARY
Reports Skip Vacuum Check mode.

SYNTAX
SVC

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports the status of Skip Vacuum Check mode.
Skip Vacuum Check mode skips the vacuum presence check during GET/PUT and HOME. This mode is meant for testing only while teaching stations.
Checks skipped:
GET - Pre-check assuring arm is empty before executing.
GET - Check for presence after pickup, ensuring enough grip to move out.
PUT - Check for presence after dropoff, ensuring grip has been released before moving out.
HOME - Valve(s) will open but no check will be made for presence on end effector. Valve(s) will be left open after.

See also SVCEN, SVCRE.

EXAMPLE

>SVC
0
>

SVCEN #

ROBOT AVAILABILITY
ATM

SUMMARY
Enables Skip Vacuum Check mode.

SYNTAX
SVCEN

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Enables Skip Vacuum Check mode.
Skip Vacuum Check mode skips the vacuum presence check during GET/PUT and HOME. This mode is meant for testing only while teaching stations.
Checks skipped:
GET - Pre-check assuring arm is empty before executing.
GET - Check for presence after pickup, ensuring enough grip to move out.
PUT - Check for presence after dropoff, ensuring grip has been released before moving out.
HOME - Valve(s) will open but no check will be made for presence on end effector. Valve(s) will be left open after.

See also SVC, SVCRE.

EXAMPLE

>SVCEN
>SVC
1
>

SVCRE #

ROBOT AVAILABILITY
ATM

SUMMARY
Resets Skip Vacuum Check mode.

SYNTAX
SVCRE

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Resets Skip Vacuum Check mode, disabling it.
Skip Vacuum Check mode skips the vacuum presence check during GET/PUT and HOME. This mode is meant for testing only while teaching stations.
Checks skipped:
GET - Pre-check assuring arm is empty before executing.
GET - Check for presence after pickup, ensuring enough grip to move out.
PUT - Check for presence after dropoff, ensuring grip has been released before moving out.
HOME - Valve(s) will open but no check will be made for presence on end effector. Valve(s) will be left open after.

See also SVC, SVCEN.

EXAMPLE

>SVC
1
>SVCRE
>SVC
0
>

TEACH #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Teaches the current coordinates to an existing station.

SYNTAX
TEACH [Station]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Teaches the current coordinates of the robot to an existing station. See NEWSTN for creating a new station with predefined parameters. Changes to stations are not permanent until SAVES is called.

Do not change parameters while the robot is in motion.

See also Station Teaching.

EXAMPLE

>RCP
2333,1337,4321
>SPOS a
2253,6754,1482
>TEACH a

>SPOS a
2333,1337,4321
>

TEACHSCAN #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Teaches the current coordinates to an existing station’s scanning coordinates.

SYNTAX
TEACHSCAN [Station]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Uses the current coordinates of the robot to calculate an existing station’s scanning coordinates. See NEWSTN for creating a new station with predefined parameters. Changes to stations are not permanent until SAVES is called.
The coordinates include a lower Z position as well as a high Z position to determine where the scanning passes start and stop. Z low position is calculated as the current Z minus one substrate pitch as determined by the station’s pitch parameter. In a similar manner, the Z high position is one pitch above the top most substrate as determined by the max slot parameter and pitch parameter of the station.
Also note that the pitch parameter’s units are 10x smaller than the axis’ units.

Do not change parameters while the robot is in motion.

See also Station Teaching.

EXAMPLE

>RCP
1234,9001,4321
>ENS
Vav
>SSPOS V

?
>TEACHSCAN V

>SSPOS V
1234,9001,4321
>

TEACHZHIGH #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Overrides the top most position of a scanning pass to the current Z coordinate or to a specific value.

SYNTAX
TEACHZHIGH [Station], [Position]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
When performing a scan, the robot performs a scan by traveling vertically and detecting the edges of each substrate and stops at a position above the top most substrate. This position is automatically calculated when teaching the Scanning Position when the robot just detects the bottom edge of the first substrate. However, this can be manually overriden using TEACHZHIGH to either the current Z axis position or a specific value passed to TEACHZHIGH.

Do not change parameters while the robot is in motion.
See also Station Teaching.

EXAMPLE

>SSPOS Z
-15843,-6636,1021
>SPAR Z 39
7271
>TEACHZHIGH Z

>SPAR Z 39
1021
>TEACHZHIGH Z 7777

>SPAR Z 39
7777
>

TEACHZLOW #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Overrides the bottom most position of a scanning pass to the current Z coordinate or to a specific value.

SYNTAX
TEACHZLOW [Station], [Position]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
When performing a scan, the robot positions itself below the bottom most substrate of that station where it does not detect anything at that moment. Then it performs the scan by traveling vertically and detecting the edges of each substrate. This position is automatically calculated when teaching the Scanning Position when the robot just detects the bottom edge of the first substrate. However, this can be manually overriden using TEACHZLOW to either the current Z axis position or a specific value passed to TEACHZLOW.

Do not change parameters while the robot is in motion.
See also Station Teaching.

EXAMPLE

>SSPOS Z
-15843,-6636,1021
>SPAR Z 38
771
>TEACHZLOW Z

>SPAR Z 38
1021
>TEACHZLOW Z 777

>SPAR Z 38
777
>

VEL #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Sets or reports the current velocity of each axis.

SYNTAX
VEL [Axis] [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
When used without parameters reports the current velocity for all axes.
When an Axis parameter is provided without a value, reports the velocity for that specific axis. When Axis and Value parameters are provided, sets the velocity parameter to the Value for the specific Axis.

EXAMPLE

>VEL
18000,12000,2000
>VEL T 18500

>VEL
18500,12000,2000
>

VER #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Reports the current firmware version.

SYNTAX
VER

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports the current firmware version. Typically used for logging purposes.

EXAMPLE

>VER
He-Five ATM Robot v.4.0.1
>

VPG #

ROBOT AVAILABILITY
ATM, HF, CR

SUMMARY
Report or sets the velocity profile generator function.

SYNTAX
VPG [Profile]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports or sets the velocity profile generator function. Bezier function enables usage of AJERK and DJERK motion parameters.

EXAMPLE

>VPG
0
>VPG 1

>VPG
1
>