1. Wafer-handling components #

The ATM robot is a three-axis robot designed for use in substrate handling and semiconductor manufacturing environments. The ATM robot is programmed and controlled using the integrated motion controller. The ATM robot is driven by brushless servo motors with incremental encoders which provide high positional repeatability. The requirements of Class 1 environment are met by the method of draining the air inside the robot body with a vacuum source.

2. Safety and Regulatory Issues #

2.1 Dangers, Warnings, Cautions, and Notes #

There are four levels of special alert notation used in this manual. In descending order of importance, they are:

NOTE: This provides supplementary information, emphasizes a point or procedure, or gives a tip for easier operation. CAUTION: This indicates a situation which, if not avoided, could result in minor injury or damage to the equipment. WARNING: This indicates a potentially hazardous situation which, if not avoided, could result in serious injury or major damage to the equipment. DANGER: This indicates an imminently hazardous situation which, if not avoided, will result in death or serious injury.

2.2 Equipment Warning Labels #

There are labels attached to the robot to warn the operator of situations that may result in injury, as follows:

3. Precautions and Required Safeguards #

This manual must be read by all personnel who install, operate, or maintain He-Five or who work within or near the work cell.

CAUTION: He-Five strictly prohibits installation, commissioning, or operation of a Robot without adequate safeguards. These must be compliant with applicable local and national standards.

Installations in EU and EEA countries must comply with EN 775 especially sections 5, 6; EN 292-2; and EN 60204-1, especially section 13.

3.1 Definition of a Manipulating Industrial Robot #

The definition of a manipulating robot according to (ISO 10218:1992(E)) is as follows:

“A manipulating robot is an automatically controlled, reprogrammable, multipurpose, manipulative machine with several degrees of freedom, which may be either fixed in place or mobile for use in industrial automation applications.”

3.2 Safety Barriers #

Safety barriers must be provided that prevent personnel from entering the workcell whenever power is applied to the equipment. He-Five are computer controlled and may be activated by remote devices under program control at times or along paths not anticipated by personnel. It is critical that safeguards be in place to prevent personnel from entering the workcell whenever power to the equipment is present.

The robot system integrator (user or operator) must ensure that adequate safeguards, safety barriers, light curtains, safety gates, safety floor mats, etc., are installed. The robot workcell must comply with applicable local and national standards.

The height and the distance of the safety fence from the robot must ensure that personnel cannot reach the danger zone of the robot.

The He-Five control system has features that aid the user in constructing system safeguards, including customer emergency stop circuitry and digital input and output lines. The emergency power-off circuitry is capable of switching external power systems and can be interfaced to the appropriate user-supplied safeguards.

3.3 Impact and Trapping Points #

Wafer-handling robots are capable of moving at high speeds. If a person is struck by a robot (impacted) or trapped (pinched) serious injury could occur. Robot configuration, joint speed, joint orientation, and attached payload all contribute to the total amount of energy available to cause injury.

3.4 Hazards from Expelling a Part or Attached Tooling #

The maximum joint tip speeds that can be achieved by ATM robot in a runaway situation are listed in the Table below. Any tooling, fixtures, end-effectors, etc., mounted to the user flange, outer link, or inner link of the robot must be attached by sufficient means to resist being expelled from the robot. Additionally, any payload must be held by the end-effector in a manner that prevents the payload from being expelled accidentally.

3.4.1 Maximum ATM robot Joint Velocities in Runaway Situations #

These velocities can occur only in a runaway or mechanical failure situation. These are not performance specifications. The safety fence or barrier constructed around the robot must be designed to withstand the impact of any item expelled accidentally from the robot.

3.5 Risk Assessment #

Without special safeguards in its control system, ATM robot could inflict serious injury on an operator working within its work envelope. Safety standards in several countries require appropriate safety equipment to be installed as part of the system. Safeguards must comply with all applicable local and national standards for the location where the robot is installed.

3.5.1 Exposure #

When servo loop is closed, all personnel must be kept out of the robot work envelope by interlocked perimeter barriers. The only permitted exception is for teaching the robot in Manual Mode by a skilled programmer, who must wear safety equipment and carry the Manual Control Pendant. Therefore, exposure of personnel to hazards related to the robot is limited (seldom and/or short exposure time).

3.5.2 Severity of Injury #

Provided that skilled personnel who enter the ATM robot work envelope are wearing protective headgear, eyeglasses, and safety shoes, it is likely that any injuries caused by the robot would be slight (normally reversible).

3.5.3 Avoidance #

Due to its light payload capacity, it is likely that such personnel could avoid being hit by the robot even in a high-acceleration, runaway, failure condition during normal operation, user-supplied interlocked guarding must be installed to prevent any person entering the workcell while Servo Loop is closed.

DANGER: System components supplied by He-Five provide a Category 1 control system as defined by EN 954. The robot system must be installed with user-supplied interlock barriers. The interlocked barrier should interrupt the AC supply to the controller in the event of personnel attempting to enter the workcell when Arm Power is enabled, except for teaching in Manual Mode. Failure to install suitable guarding could result in injury or death.

The Risk Assessment for teaching this product depends on the application. In many applications, the programmer will need to enter the robot workcell while servo loop is closed to teach the robot. Other applications can be designed so that the programmer does not have to enter the work envelope while Servo Loop is closed. Examples of alternative methods of programming include:

1. Programming from outside the safety barrier.
2. Programming with Servo Loop off (using brake release button for joint 3).
3. Copying program from another (master) robot.
4. Off-line or CAD programming.

3.5.4 Control System Behavior Category #

The following paragraphs relate to the requirements of European (EU/EEA) directives for Machinery, Electric Safety, and Electromagnetic Compatibility (EMC).

In situations with low exposure consideration factors, European Standard EN 1050 specifies use of a Category 1 Control System per EN 954. EN 954 defines a Category 1 Control System as one that employs Category B components designed to withstand environmental influences, such as voltage, current, temperature, EMI, and well-tried safety principles. The standard ATM robot control system described in this handbook employs hardware components in its safety system that meet or exceed the requirements of the EU Machinery Directive and Low Voltage Directive.

The standard control system is fully hardened to all EMI influences per the EU EMC Directive and meets all functional requirements of ISO 10218 (EN 775) Manipulating Robots Safety. In addition, a software-based reduced speed and “Soft-Servo” mode has been incorporated to limit speed and impact forces on the Operator and production tooling when the robot is operated in Manual Mode.

The standard ATM robot Control System meets or exceeds the requirements imposed by the EN 954 specified Category 1 level of safety.

3.5.5 E-Stop - CE versus SEMI S2 Compliance #

CE Compliance

In a CE Compliant configuration, the ATM robot System is integrated in a stand-alone cell configuration. The Emergency Stop (E-Stop) is associated with the robot system itself and other external devices connected to the CIP remote E-Stop circuitry. When E-Stop is actuated, it will shut off high power voltage of the robot and these other external devices.

SEMI S2 Compliance

When the ATM robot System is part of a larger SEMI S2 compliant configuration, a higher-level customer-supplied E-Stop is required. The higher-level E-Stop will shut off all power to the ATM robot System. In a SEMI S2 configuration all references to E-Stop in this manual should be considered a “ROBOT STOP”.

Enable / Emergency Stop signal (pin 4) should be connected to internal +24V (pin 1) in order to enable the system. If the signal is disconnected or connected to GND, emergency stop circuit will be activated.

To release the Z brake, Brake Release signal (pin 3) should be connected to GND (pin 2) if Line Power or External Backup Power is present. If there is no Line Power or Backup power provided to the robot, the brake can be released with an external +24V power source with positive terminal connected to Backup Power (+24V/2A, pin 6) and negative terminal connected to Brake Release (pin 3).

3.6 Intended use of the Robots #

The installation and use of He-Five products must comply with all safety instructions and warnings in this manual. Installation and use must also comply with all applicable local and national requirements and safety standards. The ATM robots are intended for use in substrate handling and semiconductor manufacturing environments for payloads less than 0.75 kg.

CAUTION: For safety reasons, it is prohibited to make certain modifications to He-Five robots.

ATM robot must not come into contact with liquids. The He-Five equipment is not intended for use in any of the following situations:

• In hazardous (explosive) atmospheres
• In mobile, portable, marine, or aircraft systems
• In life-support systems
• In residential installations
• In situations where the He-Five equipment will be subject to extremes of heat or humidity.

CAUTION: The instructions for operation, installation, and maintenance given in this Instruction Handbook must be strictly observed.

Non-intended use of an ATM robot can:

• Cause injury to personnel
• Damage the robot or other equipment
• Reduce system reliability and performance All persons that install, commission, operate, or maintain the robot must:
• Have the necessary qualifications
• Read and follow the instructions in this Instruction Handbook exactly If there is any doubt concerning the application, ask He-Five to determine if it is an intended use or not.

3.7 Robot Modifications #

It is sometimes necessary to modify the robot in order to successfully integrate it into a workcell. Unfortunately, many seemingly simple modifications can either cause a robot failure or reduce the robot’s performance, reliability, or lifetime. The following information is provided as a guideline to modifications.

3.7.1 Acceptable Modifications #

In general, the following robot modifications do not cause problems, but may affect robot performance:

• Attaching tooling, utility boxes, solenoid packs, vacuum pumps, cameras, lighting, etc., to the robot tool mount flange.
• Attaching hoses, pneumatic lines, or cables to the robot. These should be designed so they do not restrict joint motion or cause robot motion errors.

3.7.2 Unacceptable Modifications #

The modifications listed below may damage the robot, reduce system safety and reliability, or shorten the life of the robot. The warranty of the entire robot or certain parts may be voided.

CAUTION: Making any of the modifications outlined below voids the warranty of any components that He-Five determines were damaged due to the modification.

You must contact He-Five Customer Service if you are considering any of the following modifications:

• Modifying any of the robot harnesses cables
• Modifying any robot access covers or drive system components
• Modifying, including drilling or cutting, any robot surface
• Modifying any robot electrical component or printed-circuit board
• Routing additional hoses, air lines, or wires through the inside of the robot
• Modifications that compromise EMC performance, including shielding

3.8 Safety Requirements for Additional Equipment #

Additional equipment used with the ATM robot (grippers, conveyor belts, etc.) must not reduce the workcell safeguards.

Emergency stop switches must be accessible at all times.

If the robot is to be used in an EU or EEA member country, all components in the robot workcell must comply with the safety requirements in the European Machine Directive 89/392/EEC (and subsequent amendments) and related harmonized European, international, and national standards. For robot systems, these include: EN 775/ISO 10218, sections 5, 6; EN 292-2; and EN 60204. For safety fences, see EN 294.

In other countries, He-Five strongly recommends, that a similar level of safety be obtained as well as complying with the applicable local and national regulations, including SEMI-S2.

Working Areas

He-Five robots have a Teach and Normal operating modes. While in Normal Mode, personnel are not allowed in the workcell.

In Teach Mode, operators with additional safety equipment are allowed to work in the robot workcell. For safety reasons the operator should, whenever possible, stay outside of the robot work envelope to prevent injury. The maximum speed and power of the robot is reduced but it could still cause injury to the operator.

Before performing maintenance in the working envelope of the robot, power supply to the robot must be disconnected. After these precautions, a skilled person is allowed to perform maintenance on the robot.

CAUTION: Never remove any safeguarding and never make changes in the system that will decommission a physical safeguard.

Qualification of Personnel

This manual assumes that all personnel have attended a training course and have a working knowledge of the system. The user must provide the necessary additional training for all personnel who will be working with the system. As noted in this handbook, certain procedures should be performed only by skilled or instructed persons. For a description of the level of qualification, He-Five uses the standard terms:

• Skilled persons have technical knowledge or sufficient experience to enable them to avoid the dangers, electrical and/or mechanical.
• Instructed persons are adequately advised or supervised by skilled persons to enable them to avoid the dangers, electrical and/or mechanical. All personnel must observe industry-prescribed safety practices during the installation, operation, and testing of all electrically powered equipment. To avoid injury or damage to equipment, always remove power by disconnecting the AC power from the source before attempting any repair or upgrade activity. Use appropriate lockout procedures to reduce the risk of power being restored by another person while you are working on the system.

Safety Equipment for Operators Operators must wear safety equipment in the workcell. For safety reasons, operators must wear the following when they are in the robot workcell.

• Safety glasses
• Protective headgear (hard hats)
• Safety shoes Warning signs should be posted around the workcell to ensure that anyone working around the robot system knows they must wear safety equipment.

3.9 Protection against Unauthorized Operation #

The system must be protected against unauthorized use. The user or operator must restrict access to the keyboard and Teach Pendant by locking them in a cabinet or use another adequate method to prevent access to them.

3.10 Safety Aspects While Performing Maintenance #

Only skilled persons with the necessary knowledge about the safety and operating the equipment are allowed to maintain the robot, controller, and power chassis.

CAUTION: During maintenance and repair, the power of the He-Five ATM robot must be turned off. Lockout measures must be used to prevent unauthorized personnel from turning on power.

3.11 Risks That Cannot Be Avoided #

The ATM robot control system includes devices that disable Servo Loop if a system failure occurs. However, certain residual risks or improper situations could cause hazards. The following situations may result in risks that cannot be avoided:

• Failure of software or electronics that may cause high-speed robot motion in Manual Mode
• Failure of hardware associated with enabling device or E-Stop system

3.12 Risks Due to Incorrect Installation or Operation #

Take precautions to ensure that the following situations do not occur:

• Purposely defeating any aspect of the safety E-Stop system
• Improper installation or programming of the robot system
• Unauthorized use of cables other than those supplied or use of modified components in the system
• Defeating interlock so that operator can enter workcell with High Power ON
• Ejection of work piece.

4. Environmental and Facility Requirements #

The ATM robot system installation must meet the operating environment requirements of the Motion Controller electrical requirements.

4.1 Operating Environment Requirements #

Wafer handling components are designed to work in following environmental conditions: Ambient temperature 5°C to 40°C (41°F to 104°F) Humidity 5 to 90%, non-condensing

4.2 Power Requirements #

4.3 Shipment Specifications #

He-Five ships the equipment in a variety of boxes and shipping crates, depending on the sales order.

4.4 Transport and Storage #

He-Five robotic equipment must be shipped and stored in a temperature-controlled environment:

• Temperature range –25°C to +55°C.
• Humidity range 5 to 90 percent, non-condensing. The equipment should be shipped and stored in manufacturer-supplied packaging, which prevents damage from normal shock, vibration, and dust. The package must be protected from excessive shock and vibration. Use a forklift, pallet jack, or similar device to transport and store the packaged equipment. The robots must always be stored and shipped upright, in a clean, dry, condensation free area.

4.5 Unpacking and Inspecting #

Before signing the carrier’s delivery sheet, compare the actual items received (not just the packing slip) with your equipment purchase order. Verify that all items are present, the shipment is correct, and free of visible damage. If the items received do not match the packing slip, your order, or are damaged, do not sign the receipt and contact He-Five immediately. Inspect each item for external damage as it is removed from its container. If any damage is evident, contact He-Five.

CAUTION: Never lift the robot by the outer link, inner link, or vertical drive column. Damage and misalignment may occur.

WARNING: The weight of the robot is more than 35 kg (77lbs). Do not try to carry the unit by yourself.

Retain all containers and packaging materials. These items are necessary to reship equipment.

Repacking for Relocation

If the robot or other equipment needs to be relocated, reverse the steps in Chapter 3: Installation. Use original packing containers and materials and follow all safety notes used for installation. Improper packaging for shipment will void your warranty. Before unbolting the robot from the mounting surface, place the arms in a folded position and install the arm alignment fixture. The robot must always be shipped in an upright position. Serial Number Labels

The robot serial number label is located on the connector panel. Always have the serial number available when you call He-Five Customer Service for technical support.

Interface Panel Layout

An interface panel is connection point where power and vacuum sources are connected to the robot, and interfaces to host, operator, pre-aligner, and linear track are present. On customer request, different interface panel can be delivered. Main connections on the panel are as follows:

5. End effector Vacuum Lines #

The standard ATM robot is delivered with a solenoid valve and vacuum sensor for a single vacuum end effector. Two 3mm quick connect fittings are located on robot interface panel. For standard configurations use the top quick connect fitting. Insert a 3mm air line into the vacuum fitting on the connector panel of the robot.

CAUTION: Do not apply a positive pressure to either of the vacuum ports. This could cause damage to the robot.

A factory installed dual valve option is available. For the dual valve option the bottom quick connect fitting is used. Vacuum sensors’ sensitivity can be adjusted by following procedure:

1. Turn servo loop off: SOF
2. Remove the cover of the lower arm link by removing the screws that attach the cover to the arm.
3. Connect a vacuum line and install an end effector
4. Open vacuum valve 1 or 2: OUT 0 0 or OUT 1 0
5. With no wafer placed on the end effector, turn the potentiometer located on the vacuum sensor slowly counter-clockwise until the corresponding LED turns on.
   Mark this position as A.
6. With a wafer placed on the end effector, turn the potentiometer clockwise until the corresponding LED turns off.
   Mark this position as B.
7. Turn the potentiometer midway between positions A and B
8. Repeat the procedure for the other end effector, if such is installed.
9. Replace the cover of lower arm.