Station Teaching Procedure

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  2. Wafer Transfer Robots
  3. Station Teaching Procedure

Procedure #

(Parameters) are necessary.
[Parameters] are optional.

Teaching involves six steps.

  1. Position Robot to station coordinates just below first substrate.
    Touching it but not lifting it.
  2. Execute NEWSTN (Name) .
    * NEWSTN will overwrite if used on an existing station.
  3. Execute TEACH (Name) .
  4. Adjust parameters as necessary.
  5. Test new station.
  6. Save changes to flash with SAVES .

Standard parameters are automatically filled in for an 8-inch wafer radial station. They are:

  • 25 Slots
  • 2500 for Pitch (1/4 Inch)
  • 75 Pick Offset
  • 140 Stroke

Fine tuning these parameters involves the use of utility macros listed in the next section.

Example #

For example, to teach a 20 Slot, 6-Inch wafer station with the 2nd (Top) arm the steps would be:

>MVA T 4500
>0102
>MVA Z 5000
>0102
>MVA R2 6150
>0102
>NEWSTN V
>SMAX V 20
>SPCH V 1875
>SEEN V 1
>TEACH V
>GET V 1
>0102
>PUT V 25
>0102
>SSTR V 125
>SPOF V 65
>GET V 25
>0102
>PUT V 1
>0102
>SAVES

Utility Macros #

For further details, refer to the Robot Command Reference.

SPOS #
Syntax: SPOS (Name), [Axis], [Value]
Description: Get or set Station POSition.

SMAX #
Syntax: SMAX (Name), [Value]
Description: Get or set Station MAX slots (total number of slots).

SEEN #
Syntax: SEEN (Name), [Arm]
Description: Get or set Station End Effector Number (0 or 1).

SPOF #
Syntax: SPOF (Name), [Value]
Description: Get or set Station Pick OFfset. This z-offset positions the robot just above the substrate where the Robot is clear to retract.

SPCH #
Syntax: SPCH (Name), [Value]
Description: Get or set Station PitCH. 1 Unit is 0.0001 Inches.
Common values are 1875, 2500, 3937.

SDLY #
Syntax: SDLY (Name), [Value]
Description: Get or set Station DeLaY parameter. This is a resting time after picking up or dropping off the substrate to ensure proper vacuum seal or release is achieved.

STIM #
Syntax: STIM (Name), [Value]
Description: Get or set Station TIMe out. This is the maximum time to wait for a proper vacuum seal to form after waiting out the delay time. This timeout is used on pickup only.

SSTR #
Syntax: SSTR (Name), [Value]
Description: Get or set Station STRoke. The distance the Z-Axis moves to drop off substrate and be clear to retract.

SRET #
Syntax: SRET (Name), [Value]
Description: Get or set Station RETract position.

SINL #
Syntax: SINL (Name), [Value]
Description: Get or set Station IN-Line state. Determines if the station is in-line or not.

SDPT #
Syntax: SDPT (Name), [Value]
Description: Get or set Station DepPTh. Used for in-line stations.

SANG #
Syntax: SANG (Name), [Value]
Description: Get or set Station ANGle. Used for in-line stations.

SEEO #
Syntax: SEEO (Name), [Value]
Description: Get or set Station End Effector Orientation. This is used for Robots configured with a flipper.

SCLEAR #
Syntax: SCLEAR (Name)
Description: Delete station.

ENS #
Syntax: ENS
Description: Get (ENumerate) all Stations.

SAVES #
Syntax: SAVES
Description: SAVEs all Station parameters to flash.