Status Report

  1. Documentation
  2. Wafer Transfer Robots
  3. Status Report

Status Report #

There are predefined command providing status for different positions or work flows of the robot arms and station. Main status commands used mostly are:

  • CSTATUS - Command Execution Status
  • STATUS - Current Robot Status
  • SSTATUS - Scanning Status and Scanning Results
  • HSTATUS - Homing Status