Generic Motion Commands #
Basic motion commands used to readjust robot arm based on current or specific position.
- Move abs/rel
- Move to station defined points
Wafer Handling Commands #
Command used to order robot to move to station and get a waffer from available cassette and place wafer in another station
- Get/Put
Initialization and Homing #
Upon startup of software, startup command is used automatically and the robot needs to be homed. These are best used when robot is rebooted or stopped due to out-of-sync with commands or needs recalibration
- Startup / Home
Cassettes Scanning #
Robot is moved to scanning position towards provided station name. After the scan process has been completed, robot moved to home position and scan data can be retrieved with specified command
- Scanning operation
- retrival of scanned data
Robot Calibration and Teaching #
Robot can be recalibrated with aditional offsets towards stations and or home offsets. With predefined teaching command, allows software to store coordinates from current robot position and provided station parameters.
- Calibrating home offsets
- Teaching stations
Programming User Macros #
Software accepts custom user macros predifined in user.mac. User macros can have other procedures not already implemented in the software of the robot. It is advised to be careful when adding a user.mac as macros and procedures need to be tested for proper motion of arms.
- User macro definition
- User.mac
- Execution model – macros vs procedures
- Macro Parameters
- Error handling