Procedure #

• Position Robot to scanning coordinates.
  • Just detecting the bottom edge of the bottom most substrate.
• Execute TEACHSCAN (Station)
  • Does not create a new station, station has to already exist.
• Test Scan.
  • Single, or dual-pass, with or without T offset.
  • SMAP to see results.
• Adjust parameters as necessary.
  • SSPOS, SPCH, SSLIM, SSOFS, TEACHZHIGH, TEACHZLOW
• Execute SAVES to save changes to flash.

Default Settings are as follows:

• Z-Low position, where the scanning motion begins is one station pitch below the taught position.
• Similarly, Z-High position is one pitch above top most slot.
• Maximum substrate thickness is 50.
• Substarte Scan Slot position Limit is 33 (see SSLIM).
• T Offset for dual pass is 0.

Commands #

MTS, READS, SAVES, SCAN, SMAP, SMAX, SPAR, SPCH, SPOS, SRET, SSLIM, SSOFS, SSPOS, TEACHSCAN, TEACHZHIGH, TEACHZLOW

MTS #

ROBOT AVAILABILITY
ATM

SUMMARY
Moves to Scanning position of a taught station.

SYNTAX
MTS [Station] [Z-Position]

ROBOT PRECONDITIONS
HOMED SERVO ENABLED

USAGE NOTES
Executes motion to position the robot in Scanning postition of a taught station. Taught position is lowest position of lowest slot that detects the bottom of the substrate. Z-LOW position is where the sensor is below the taught position where the sensor no longer detects the substrate. Z-HIGH position is above the top most slot and the sensor no longer detects a substrate. For manually defined scanning positions, station parameter 37 must be set to 1 to consider Scanning positions taught.
See laso TEACHSCAN, SSPOS, SCAN, SPAR

EXAMPLE

>SSPOS V
15432,-7123,1033
>MTS V 

>0102
>RCP
15432,-7123,1033
>

READS #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reads robot station parameters from PARS-S.DAT file.

SYNTAX
READS

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reads and applies robot station parameters from file.

Will overwrite any changes to parameters not saved.
Do not execute while the robot is in motion. May affect the robot’s behavior during the motion.
See also SAVES.

EXAMPLE

>READS
>

SAVES #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Saves robot parameters to the file PARS-M.DAT .

SYNTAX
SAVES

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Saves robot station parameters to file making changes last after reboot.

This will overwrite the file, make a backup before saving or changes will be irreversible.

See also READS.

EXAMPLE

>SAVES

>

SCAN #

ROBOT AVAILABILITY
ATM

SUMMARY
Scans a taught station.

SYNTAX
SCAN [Station] [Double-Pass]

ROBOT PRECONDITIONS
HOMED SERVO ENABLED

USAGE NOTES
Executes Scanning procedure. For manually defined scanning positions, station parameter 37 must be set to 1 to consider Scanning positions taught.
See laso TEACHSCAN, SSLIM, SSOFS, SSPOS, MTS, SPAR, SMAP

EXAMPLE

>SSPOS V
-15540,-6278,1035
>SCAN V

>0102
>RCP
-15540,-6278,7285
>SCAN V 1

>0102
>RCP
15540,-6278,785
>SMAP
0000000000000000000000000
>

SMAP #

ROBOT AVAILABILITY
ATM

SUMMARY
Reports scanning results from last scan procedure.

SYNTAX
SMAP

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Reports scanning results from last scanning procedure.

Interpretation of scanning samples is determined by Station Pitch, Station Max Thickness, and Station Scanning Position Limit parameters.

* - Scanning locates edges of substrates. Therefore detecting one wafer requires 2 samples, one for each edge. Unknown mapping code happens when an odd number of edges were detected during scanning. This may require reteaching Z-Low or Z-High so that the sensor does not detect an edge when it reaches either of the mentioned coordinates.

EXAMPLE

>SMAP
0101020440004400100100010
>

SMAX #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets Station Max Slots parameter.

SYNTAX
SMAX [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Station Max Slots utility macro. Used to report or change the maximum station slots.

A station with Max Slots value of 0 or less is considered untaught and will not be reported by SPOS or ENS.

Changes to stations are not permanent until SAVES is called.

Do not change station parameters while the robot is in motion, this may lead to unexpected behavior.
See also SPAR.

EXAMPLE

>SMAX V
25
>SMAX V 15

>SMAX V
15
>

SPAR #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets a station parameter.

SYNTAX
SPAR [Station] [Parameter ID] [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Typically used for fine tuning station parameters that do not have a corresponding utility macro. However, all parameters are made available through SPAR. See Station Teaching
Parameters are not saved and only valid until reboot. See SAVES.
Do not change parameters while the robot is in motion.

The table below lists available station parameter and their description.

EXAMPLE

>ENS
Vv
>SPAR V 3
25
>SPAR V 3 20

>SPAR V 3
20
>

SPCH #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets Station Pitch parameter.

SYNTAX
SPCH [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Station Pitch utility macro. Used to report or change the Pitch of an existing station.
The Pitch units are 10 000 units to 1 Inch. so a pitch of 0.1875 inches would be 1875 in robot units. or 0.25 would be 2500.

Changes to stations are not permanent until SAVES is called.

Do not change station parameters while the robot is in motion, this may lead to unexpected behavior.
See also SPAR.

EXAMPLE

>SPCH V
1875
>SPCH V 2500

>SPCH V
2500
>

SPOS #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets a station’s pickup coordinates.

SYNTAX
SPOS [Station], [Axis], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
When used with just the Station parameter, reports station’s taught pickup coordinates. This is the position just touching the substrate just below or when configured with a flipper, just above, depending on the station orientation. (SEEO).
When used with the Station and Axis parameters, reports the position of the specific axis requested.
When used with Station, Axis, and Value parameters, sets the specific Axis positon to the Value of the specific Station.

See also Station Teaching.

EXAMPLE

>ENS
Vav
>SPOS v
-2492,5898,1547
>SPOS v Z 1650

>SPOS v
-2492,5898,1650
>

SRET #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets Station Retract Position parameter.

SYNTAX
SRET [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Station Retract Position utility macro. Used to report or change the Retract Position of the R axis or both axes in dual arm configurations.

In Dual Arm configurations, the arm that is not in use will move to the retract position.

Changes to stations are not permanent until SAVES is called.

Do not change station parameters while the robot is in motion, this may lead to unexpected behavior.
See also SPAR.

EXAMPLE

>SRET V
-5000
>SRET V -5500

>SRET V
-5500
>

SSLIM #

ROBOT AVAILABILITY
ATM

SUMMARY
Reports or sets a station’s scanning slot position limit.

SYNTAX
SSLIM [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
When used with just the Station parameter, reports a station’s scanning slot position limit as a percent of the pitch.
When used with Station and Value, sets the station’s scanning slot position limit as a percent of the pitch.
Using values above 50 is not recommended.
Example, a Scanning Station Slot Limit of 34 on a Pitch of 1875 results in 63 robot units where 1000 robot units is 1 inch.
When processing scanning data, a sample will be considered in a slot if its bottom edge is within 63 units below the expected position of that slot.
That same sample would also be considered crossed with the next slot above if the bottom edge is 63 units above the expected slot position.
With a value of 34, the substrate effectively can occupy 68 percent of a slot, with a maximum offset of 34 percent below the calculated bottom position of a slot from taught position.

See also SCAN, MTS, SMAP.

EXAMPLE

>ENS
Vav
>SSLIM V
34
>SSLIM V 20

>SSLIM V
20
>

SSOFS #

ROBOT AVAILABILITY
ATM

SUMMARY
Reports or sets a station’s scanning T offset for dual pass scans.

SYNTAX
SSOFS [Station], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
When using a dual pass scan, if a rotation is desired between passes, this value is set to a non zero value. The R axis will retract and T will shift by the offset with clockwise being positive, and counter clockwise being negative.

See also SCAN, MTS, SMAP.

EXAMPLE

>ENS
Vav
>SSOFS V
0
>SSOFS V 350

>SSOFS V
350
>

SSPOS #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Reports or sets a station’s scanning coordinates.

SYNTAX
SSPOS [Station], [Axis], [Value]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
When used with just the Station parameter, reports station’s scanning coordinates. This position should be under the bottom most substrate and clear from obstruction to prevent a false detection at the start of the procedure.
When used with Station and Axis parameter, reports the specific Axis position.
When used with Station, Axis, and Value parameter, sets the Axis position to the Value.

See also SCAN, MTS, SMAP.

EXAMPLE

>ENS
Vav
>SSPOS V
1000,-2000,1000
>SSPOS V Z 989

>SSPOS V
1000,-2000,989
>

TEACHSCAN #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Teaches the current coordinates to an existing station’s scanning coordinates.

SYNTAX
TEACHSCAN [Station]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
Uses the current coordinates of the robot to calculate an existing station’s scanning coordinates. See NEWSTN for creating a new station with predefined parameters. Changes to stations are not permanent until SAVES is called.
The coordinates include a lower Z position as well as a high Z position to determine where the scanning passes start and stop. Z low position is calculated as the current Z minus one substrate pitch as determined by the station’s pitch parameter. In a similar manner, the Z high position is one pitch above the top most substrate as determined by the max slot parameter and pitch parameter of the station.
Also note that the pitch parameter’s units are 10x smaller than the axis’ units.

Do not change parameters while the robot is in motion.

See also Station Teaching.

EXAMPLE

>RCP
1234,9001,4321
>ENS
Vav
>SSPOS V

?
>TEACHSCAN V

>SSPOS V
1234,9001,4321
>

TEACHZHIGH #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Overrides the top most position of a scanning pass to the current Z coordinate or to a specific value.

SYNTAX
TEACHZHIGH [Station], [Position]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
When performing a scan, the robot performs a scan by traveling vertically and detecting the edges of each substrate and stops at a position above the top most substrate. This position is automatically calculated when teaching the Scanning Position when the robot just detects the bottom edge of the first substrate. However, this can be manually overriden using TEACHZHIGH to either the current Z axis position or a specific value passed to TEACHZHIGH.

Do not change parameters while the robot is in motion.
See also Station Teaching.

EXAMPLE

>SSPOS Z
-15843,-6636,1021
>SPAR Z 39
7271
>TEACHZHIGH Z

>SPAR Z 39
1021
>TEACHZHIGH Z 7777

>SPAR Z 39
7777
>

TEACHZLOW #

ROBOT AVAILABILITY
ATM, CR

SUMMARY
Overrides the bottom most position of a scanning pass to the current Z coordinate or to a specific value.

SYNTAX
TEACHZLOW [Station], [Position]

ROBOT PRECONDITIONS
NONE

USAGE NOTES
When performing a scan, the robot positions itself below the bottom most substrate of that station where it does not detect anything at that moment. Then it performs the scan by traveling vertically and detecting the edges of each substrate. This position is automatically calculated when teaching the Scanning Position when the robot just detects the bottom edge of the first substrate. However, this can be manually overriden using TEACHZLOW to either the current Z axis position or a specific value passed to TEACHZLOW.

Do not change parameters while the robot is in motion.
See also Station Teaching.

EXAMPLE

>SSPOS Z
-15843,-6636,1021
>SPAR Z 38
771
>TEACHZLOW Z

>SPAR Z 38
1021
>TEACHZLOW Z 777

>SPAR Z 38
777
>