Introduction #
High precision prealigners designed to accompany semiconductor wafer handlers.
Configuration #
TBD
- HFP-812
- HFP-312
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Features #
- Compact design
- Highly repeatable
- Intelligent commands
- Fast-scan high-throughout option available
- Alignment cycle time of less than four seconds
- Class 1 clean-room environment capability
Specification #
- Input Voltage Range
- 24VDC
- Wafer Sizes
- HFP-812 - 200mm, 300mm
- HFP-312 - 3", 100mm, 125mm, 200mm, 300mm
- Operating Temperature
- 50ºF to 104ºF
- 10ºC to 40ºC
- Servo Axes
- HFP-812 - Two Axies
- HFP-312 - Three Axes
- Axes of Motion
- Radial - X/Y Offset
- Theta - Rotate Chuck
- Z - Raise/Lower Pins
- Detection
- Optical, Non-contact
- Flat & Notch Compatibility
- Entire SEMI Range
- Reliability
- MTBF > 65000 hours
Software #
- Motion Control Framework
- Robust Servo algorithm.
- Custom Macro compatible.
Interfacing #
- Mounting Surface
- Mounting Screws
- Leveling Screws
- See Appendix A for Layout
- I/O Panel
- All connectors on panel.
- Vacuum Fittings too.
- Communication Protocol
- ASCII Based RS-232 or TCP/IP
- Power Requirements
- 100-240 VAC
- 50-60 Hz
Compliances #
- Safety - Semi S2
- Cleanliness - ISO Class 1 (At substrate handling level.)
Maintenance #
- Operating Environment
- Ambient Temperature - ##°C to ##°C (##°F to ##°F)
- Humidity - 5% to 90% non-condensing
- Storage/Transportation
- Temperature - ##°C to ##°C
- Humidity - 5% to 90% non-condensing
- Equipment should be shipped and stored in manufacturer-supplied packaging.
- Must always be stored or shipped upright in a clean, dry, condensation free environment.
- Recovering from EMO
- Restore secure environment.
- Restore power to motors.
- Enable Servo.
- Maintenance Parts List
- TBD
Appendices #
Appendix A - HFP-812 Dimensions & Mounting #
Appendix B - HFP-312 Dimensions & Mounting Page 1 #
Appendix B - HFP-312 Dimensions & Mounting Page 2 #
Appendix C - I/O Panel #
| # | Type | Description |
|---|---|---|
| 1 | Connector | LAN |
| 2 | Fitting | Vacuum Fitting |
| 3 | Connector | RS232 |
| 4 | Connector | Power |
Appendix D - RS-232 Pinout #
| Pin ID | Signal | Description | Pin ID | Signal | Description | |
|---|---|---|---|---|---|---|
| 1 | N/C | 6 | N/C | |||
| 2 | RS232 Rx | Receive Data | 7 | N/C | ||
| 3 | RS232 Tx | Transmit Data | 8 | N/C | ||
| 4 | N/C | 9 | N/C | |||
| 5 | GND | Ground |
N/C = Not Connected