HFS660

Introduction #

5-Axis dual end-effector robots designed for use in substrate handling and semiconductor manufacturing environments.

Configuration #

• Side mount compatible.
• External control box, PSU.
• Maximum reach.
  • 742 mm (HFS660)
• Safe envelope (diameter).
  • 660 mm (HFS660)
• Vertical travel
  • 350 mm (HFS660)

Features #

• Brushless servo motors. Absolute encoders.
• External/Internal battery for encoders power backup.
• Comprehensive software tools and utilities.
• Handles radial stations only.
• Standard RS-232 and TCP/IP interface communication.
• Compliance with Semi S2 and other industry safety standard.

Specification #

• Units - Inches
• Resolution
  • T - 0.01 °
  • R/R2 - 0.0254 mm (0.001 Inch)
  • Z - 0.0254 mm (0.001 Inch)
  • X - 0.0254 mm (0.001 Inch)
• Repeatability
  • Unidirectional - +/- 0.025 mm
  • Bidirectional - +/- 0.050 mm
• Range of Motion (Robot Units)
  • T - >360 Degrees (-25 000 to 25 000)
  • R/R2 - 900 mm (-22 165 to 22 165)
  • Z - 350 mm (0 to 13 780)
• Maximum Velocity (Robot Units)
  • T - 420 °/s (36 000 /s)
  • R/R2 - 1900 mm/s (75 000 /s)
  • Z - 500 mm/s (20 000 /s)
• Payload
  • 300 mm (12 in) wafers
  • Max 0.455 kg (1 lbs.)
• Weight - 122kg (270 lbs.)
• Reliability
  • MTBF > 60 000 hours
  • MCBF > 10 000 000 cycles

Software #

• Motion Control Framework
  • Robust Servo algorithm.
  • Powerful programming language.
  • Custom Macro compatible.
• Robot Control Center
  • Modern Utility Interface with station editing and tester.

Interfacing #

• Mounting Surface
  • Mounting Screws
  • Leveling Screws
  • See Appendix A for Layout
• I/O Panel
  • All connectors on panel.
  • Vacuum Fittings too.
• Communication Protocol
  • ASCII Based RS-232 or TCP/IP
• Power Requirements
  • 100-240 VAC
  • 50-60 Hz
• EMO Safety

Compliances #

• Safety - Semi S2
• Cleanliness - ISO Class 1 (At substrate handling level.)

Maintenance #

• Operating Environment
  • Ambient Temperature - 5°C to 40°C (41°F to 104°F)
  • Humidity - 5% to 90% non-condensing
• Storage/Transportation
  • Temperature - -25°C to 55°C
  • Humidity - 5% to 90% non-condensing
  • Equipment should be shipped and stored in manufacturer-supplied packaging.
  • Must always be stored or shipped upright in a clean, dry, condensation free environment.
• Recovering from EMO
  • Restore secure environment.
  • Restore power to motors.
  • Enable Servo.
• Maintenance Parts List
  • Belts
  • Cleanroom Grease
  • Brackets
  • End Effector

Appendices #

Appendix A - HFS660 Mounting/Layout #

Appendix C - I/O Panel #

To Do : Updated IO Panel

Appendix D - I/O Panel Table #

Appendix E - RS-232 Pinout #

N/C = Not Connected

Appendix F - User IO Pinout #

N/C = Not Connected

Appendix G - Opto-Isolated Digital Input Diagrams #

Appendix H - Opto-Isolated Digital Output Diagrams #