T400/470 DA155/225

Introduction #

4-Axis dual arm robots designed for use in substrate handling and semiconductor manufacturing environments.

Configuration #

• Top mount compatible.
• External power supply.
• Arm reach without bracket and end effectors.
  • 310 mm (DA155)
  • 450 mm (DA225)
• Safe envelope (diameter).
  • 500 mm (DA155)
  • 640 mm (DA225)
• Vertical travel
  • 400 mm (T400)
  • 470 mm (T470)

Features #

• Brushless servo motors. Absolute encoders.
• External/Internal battery for encoders power backup.
• Comprehensive software tools and utilities.
• Handles radial and inline stations.
• Standard RS-232 and TCP/IP interface communication.
• Compliance with Semi S2 and other industry safety standard.

Specification #

• Units - Inches
• Resolution
  • T - 0.01 °
  • R/R2 - 0.0254 mm (0.001 Inch)
  • Z - 0.0254 mm (0.001 Inch)
• Repeatability
  • Unidirectional - +/- 0.025 mm
  • Bidirectional - +/- 0.050 mm
• Range of Motion (Robot Units)
  • T - 480 Degrees (-24 000 to 24 000)
  • R/R2 - Configuration Specific
    • DA155 - 620 mm (-12 204 to 12 204)
    • DA225 - 900 mm (-17 716 to 17 716)
  • Z - Configuration Specific
    • T400 - 400 mm (0 to 15 748)
    • T470 - 470 mm (0 to 18 503)
• Maximum Velocity (Robot Units)
  • T - 360 °/s (36 000 /s)
  • R/R2 - 1016 mm/s (40 000 /s)
  • Z - 450 mm/s (18 000 /s)
• Payload
  • 150 mm (6 in) wafers
  • 1 kg (2.2 lbs.)
• Weight - 40kg (88 lbs.)
• Reliability
  • MTBF > 60 000 hours
  • MCBF > 10 000 000 cycles

Software #

• Motion Control Framework
  • Robust Servo algorithm.
  • Powerful programming language.
  • Custom Macro compatible.
• Robot Control Center
  • Modern Utility Interface with station editing and tester.

Interfacing #

• Mounting Surface
  • Mounting Screws
  • Leveling Screws
  • See Appendix A for Layout
• I/O Panel
  • All connectors on panel.
  • Vacuum Fittings too.
• Communication Protocol
  • ASCII Based RS-232 or TCP/IP
• Power Requirements
  • 100-240 VAC
  • 50-60 Hz
• EMO Safety

Compliances #

• Safety - Semi S2
• Cleanliness - ISO Class 1 (At substrate handling level.)

Maintenance #

• Operating Environment
  • Ambient Temperature - 5°C to 40°C (41°F to 104°F)
  • Humidity - 5% to 90% non-condensing
• Storage/Transportation
  • Temperature - -25°C to 55°C
  • Humidity - 5% to 90% non-condensing
  • Equipment should be shipped and stored in manufacturer-supplied packaging.
  • Must always be stored or shipped upright in a clean, dry, condensation free environment.
• Recovering from EMO
  • Restore secure environment.
  • Restore power to motors.
  • Enable Servo.
• Maintenance Parts List
  • Belts
  • Cleanroom Grease
  • Brackets
  • End Effector

Appendices #

Appendix A - Dimensions/Mounting T400/470 DA155 #

Appendix B - Dimensions/Mounting T400/470 DA225 #

Appendix C - I/O Panel #

Appendix D - I/O Panel Table #

Appendix E - RS-232 Pinout #

N/C = Not Connected

Appendix F - User IO Pinout #

N/C = Not Connected

Appendix G - Opto-Isolated Digital Input Diagrams #

Appendix H - Opto-Isolated Digital Output Diagrams #